公开(公告)号：US20230221659A1

公开(公告)日：2023-07-13

申请号：US18116218

申请日：2023-03-01

Applicant: ASML NETHERLANDS B. V.

Inventor： Yongfeng NI ,  Ronald Franciscus Herman HUGERS ,  Andreas Johannes Antonius BROUNS

IPC: G02B3/00 ,  G02B27/30 ,  G03F7/20

CPC classification number: G02B3/00 ,  G02B27/30 ,  G03F7/7015 ,  G02B7/026

Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.