公开(公告)号：US20190079416A1

公开(公告)日：2019-03-14

申请号：US16070848

申请日：2017-01-30

Applicant: ASML NETHERLANDS B.V.

Inventor： Robbert Edgar VAN LEEUWEN ,  Hans BUTLER

IPC: G03F7/20 ,  G01B9/02

CPC classification number: G03F7/70758 ,  G01B9/02015 ,  G01B9/02049 ,  G03F7/70733 ,  G03F7/70775 ,  G03F7/7085 ,  H01L41/00 ,  H01L41/02 ,  H01L41/04

Abstract: An actuator system configured to position an object, the actuator system includes a piezo actuator having an actuator contact surface. The piezo actuator is configured to exert a force via the actuator contact surface onto the object. The piezo actuator includes a transparent piezo material. The actuator system further has an optical position sensor configured to measure a position of the actuator contact surface. The optical position sensor is configured to transmit an optical beam through the transparent piezo material to the actuator contact surface. The optical position sensor may form an interferometer.

公开(公告)号：US20210387892A1

公开(公告)日：2021-12-16

申请号：US17287015

申请日：2019-10-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Robbert Edgar VAN LEEUWEN ,  Amir ABDOLVAND

IPC: C03B37/012 ,  C03C25/68 ,  C03B37/027 ,  G03F7/20 ,  G01N21/956 ,  G02F1/35 ,  G02F1/365

Abstract: An optical fiber, manufacturing intermediate for forming an optical fiber and a method for forming an optical fiber. The method includes providing a manufacturing intermediate having an elongate body and having an aperture extending through the elongate body along an axial dimension of the elongate body, a boundary of the aperture defining an internal surface of the manufacturing intermediate. The method further includes etching the internal surface of the manufacturing intermediate using an etching substance, and drawing the manufacturing intermediate along the axial dimension so as to form the optical fiber.

公开(公告)号：US20160223917A1

公开(公告)日：2016-08-04

申请号：US15077439

申请日：2016-03-22

Applicant: ASML NETHERLANDS B.V

Inventor： Engelbertus Antonius Fransiscus VAN DER PASCH ,  Andre Bernardus JEUNINK ,  Robbert Edgar VAN LEEUWEN ,  Emiel Jozef Melanie EUSSEN

IPC: G03F7/20

CPC classification number: G03F7/70725 ,  G03F7/70775 ,  G03F7/7085

Abstract: A measurement system configured to measure a position dependent signal of an object table, the measurement system including at least one sensor mountable on the object table and a sensor target object mountable on a substantially stationary frame, and a mounting device configured to mount the sensor target object on the substantially stationary frame, wherein the measurement system further includes a compensator configured to compensate movements and/or deformations of the sensor target object with respect to the substantially stationary frame. The compensator may include a passive or an active damper and/or a feedback position controller. In an alternative embodiment, the compensator includes a gripping device which fixes the position of the sensor target object during a high accuracy movement of the movable object.

Abstract translation: 一种测量系统，被配置为测量对象台的与位置相关的信号，所述测量系统包括可安装在所述对象台上的至少一个传感器和可安装在基本上固定的框架上的传感器目标对象;以及安装装置，其被配置为安装所述传感器目标 物体在基本上固定的框架上，其中测量系统还包括补偿器，其被配置为补偿传感器目标物体相对于基本上固定的框架的运动和/或变形。 补偿器可以包括无源或主动阻尼器和/或反馈位置控制器。 在替代实施例中，补偿器包括夹持装置，其在可移动物体的高精度运动期间固定传感器目标物体的位置。