公开(公告)号：US20210097665A1

公开(公告)日：2021-04-01

申请号：US16982092

申请日：2019-03-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Chung-Bin CHUANG ,  Sander Silvester Adelgondus Marie JACOBS

IPC: G06T7/00 ,  G01B11/02

Abstract: Methods and apparatuses for determining a property of a structure fabricated on a substrate, by: determining a measured characteristic from pixels of a measured pupil image of the structure, the measured characteristic having less information than the measured pupil image; generating an initial simulated characteristic corresponding to the measured characteristic and based on a candidate model of the structure; comparing the measured characteristic to the simulated characteristic in an iterative method until a difference therebetween is less than a coarse threshold; generating an initial simulated pupil image based on the coarse model as the candidate model; comparing at least a portion of the measured pupil image to at least a portion of the simulated pupil image in an iterative method until a difference therebetween is less than a fine threshold.