公开(公告)号：US10126659B2

公开(公告)日：2018-11-13

申请号：US15286319

申请日：2016-10-05

Applicant: ASML NETHERLANDS B.V.

Inventor： Ferry Zijp ,  Sietse Thijmen Van Der Post ,  Fanhe Kong ,  Duygu Akbulut

IPC: G03B27/68 ,  G03F7/20 ,  G02B21/24 ,  G01N21/956

Abstract: A method including obtaining a plurality of radiation distributions of measurement radiation redirected by the target, each of the plurality of radiation distributions obtained at a different gap distance between the target and an optical element of a measurement apparatus, the optical element being the nearest optical element to the target used to provide the measurement radiation to the target, and determining a parameter related to the target using data of the plurality of radiation distributions in conjunction with a mathematical model describing the measurement target.