公开(公告)号：US20240385531A1

公开(公告)日：2024-11-21

申请号：US18639905

申请日：2024-04-18

Applicant: ASML NETHERLANDS B.V.

Inventor： Alexandru ONOSE ,  Remco DIRKS ,  Roger Hubertus Elisabeth Clementine BOSCH ,  Sander Silvester Adelgondus Marie JACOBS ,  Frank Jaco BUIJNSTERS ,  Siebe Tjerk DE ZWART ,  Artur PALHA DA SILVA CLERIGO ,  Nick VERHEUL

IPC: G03F7/00

Abstract: A method, computer program and associated apparatuses for metrology. The method includes determining a reconstruction recipe describing at least nominal values for use in a reconstruction of a parameterization describing a target. The method includes obtaining first measurement data relating to measurements of a plurality of targets on at least one substrate, the measurement data relating to one or more acquisition settings and performing an optimization by minimizing a cost function which minimizes differences between the first measurement data and simulated measurement data based on a reconstructed parameterization for each of the plurality of targets. A constraint on the cost function is imposed based on a hierarchical prior. Also disclosed is a hybrid model method comprising obtaining a coarse model operable to provide simulated coarse data; and training a data driven model to correct the simulated coarse data so as to determine simulated data for use in reconstruction.

公开(公告)号：US20220171290A1

公开(公告)日：2022-06-02

申请号：US17436947

申请日：2020-02-26

Applicant: ASML NETHERLANDS B.V.

Inventor： Alexandru ONOSE ,  Remco DIRKS ,  Roger Hubertus Elisabeth Clementin BOSCH ,  Sander Silvester Adelgondus Marie JACOBS ,  Frank Jaco BUIJNSTERS ,  Siebe Tjerk DE ZWART ,  Artur PALHA DA SILVA CLERIGO ,  Nick VERHEUL

IPC: G03F7/20

Abstract: A method, computer program and associated apparatuses for metrology. The method includes determining a reconstruction recipe describing at least nominal values for use in a reconstruction of a parameterization describing a target. The method includes obtaining first measurement data relating to measurements of a plurality of targets on at least one substrate, the measurement data relating to one or more acquisition settings and performing an optimization by minimizing a cost function which minimizes differences between the first measurement data and simulated measurement data based on a reconstructed parameterization for each of the plurality of targets. A constraint on the cost function is imposed based on a hierarchical prior. Also disclosed is a hybrid model method comprising obtaining a coarse model operable to provide simulated coarse data; and training a data driven model to correct the simulated coarse data so as to determine simulated data for use in reconstruction.