公开(公告)号：USRE48515E1

公开(公告)日：2021-04-13

申请号：US15596843

申请日：2017-05-16

Applicant: ASML NETHERLANDS B.V.

Inventor： Jacobus Hermanus Maria Neijzen ,  Helmar Van Santen

IPC: G01G5/00 ,  G03B27/52 ,  G02B27/42 ,  G03C5/00 ,  G11B7/26 ,  G11B7/1374 ,  B82Y10/00 ,  G03F7/20 ,  G11B7/122

Abstract: For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the lens is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the lens nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit. At least a portion of the liquid fills up a recess through which the radiation irradiates the spot.