公开(公告)号：US12243768B2

公开(公告)日：2025-03-04

申请号：US17421085

申请日：2019-12-13

Applicant: ASML NETHERLANDS B.V.

Inventor： Johannes Josephus Maassen ,  André Schreuder ,  Herman Marquart

IPC: H01L21/687 ,  G03F7/00

Abstract: A substrate holder including: a main body having a main body surface; a plurality of burls projecting from the main body surface and configured for supporting the substrate; and an edge seal projecting from the main body surface, wherein: the edge seal is spaced apart from the plurality of burls so as to define a gap therebetween, the gap having a width greater than or equal to about 75% of a pitch of the plurality of burls; the plurality of burls includes a first group of burls and a second group of burls surrounding the first group of burls; and the stiffness in the direction perpendicular to the support plane per unit area of the second group of burls is greater than or equal to about 150% of the stiffness in the direction perpendicular to the support plane per unit area of the first group of burls.