公开(公告)号：US11664264B2

公开(公告)日：2023-05-30

申请号：US16075754

申请日：2016-12-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Andre Bernardus Jeunink ,  Robby Franciscus Josephus Martens ,  Youssef Karel Maria De Vos ,  Ringo Petrus Cornelis Van Dorst ,  Gerhard Albert Ten Brinke ,  Dirk Jerome Andre Senden ,  Coen Hubertus Matheus Baltis ,  Justin Johannes Hermanus Gerritzen ,  Jelmer Mattheüs Kamminga ,  Evelyn Wallis Pacitti ,  Thomas Poiesz ,  Arie Cornelis Scheiberlich ,  Bert Dirk Scholten ,  André Schreuder ,  Abraham Alexander Soethoudt ,  Siegfried Alexander Tromp ,  Yuri Johannes Gabriël Van De Vijver

IPC: H01L21/683 ,  H01L21/687 ,  G03F7/20 ,  B25B11/00

CPC classification number: H01L21/6838 ,  B25B11/005 ,  G03F7/707 ,  G03F7/70733 ,  H01L21/68742

Abstract: A method for unloading a substrate from a support table configured to support the substrate, the method including: supplying gas to a gap between a base surface of the support table and the substrate via a plurality of gas flow openings in the support table, wherein during an initial phase of unloading the gas is supplied through at least one gas flow opening in an outer region of the support table and not through any gas flow opening in a central region of the support table radially inward of the outer region, and during a subsequent phase of unloading the gas is supplied through at least one gas flow opening in the outer region and at least one gas flow opening in the central region.

公开(公告)号：US11556064B2

公开(公告)日：2023-01-17

申请号：US17269328

申请日：2019-07-22

Applicant: ASML Netherlands B.V.

Inventor： Gijs Kramer ,  Theodorus Marcus Nagtegaal ,  André Schreuder ,  Anna Catharina Verkaik

IPC: G03F7/20

Abstract: The invention provides a stage apparatus, comprising an object support comprising a ring shaped protrusion having an outer radius in a first plane, and configured to support an object with a radius in the first plane larger than the outer radius of the ring shaped protrusion. The stage apparatus further comprises a sensor module configured to detect the object support, and the object when it is arranged on the object support. The stage apparatus further comprises a processing unit configured to receive one or more signals from the sensor module, and to determine, based on said one or more signals, a position of the object relative to the ring shaped protrusion when the object is arranged on the object support. The processing unit is further configured to determine, based on said position of the object, an offset value representing the position of the object relative to the ring shaped protrusion.

公开(公告)号：US20250157849A1

公开(公告)日：2025-05-15

申请号：US19026708

申请日：2025-01-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Johannes Josephus MAASSEN ,  André Schreuder ,  Herman Marquart

IPC: H01L21/687 ,  G03F7/00

Abstract: A substrate holder including: a main body having a main body surface; a plurality of burls projecting from the main body surface and configured for supporting the substrate; and an edge seal projecting from the main body surface; wherein: the edge seal is spaced apart from the plurality of burls so as to define a gap therebetween, the gap having a width greater than or equal to about 75% of a pitch of the plurality of burls; the plurality of burls includes a first group of burls and a second group of burls surrounding the first group of burls; and wherein the stiffness in the direction perpendicular to the support plane per unit area of the second group of burls is greater than or equal to about 150% of the stiffness in the direction perpendicular to the support plane per unit area of the first group of burls.

公开(公告)号：US12243768B2

公开(公告)日：2025-03-04

申请号：US17421085

申请日：2019-12-13

Applicant: ASML NETHERLANDS B.V.

Inventor： Johannes Josephus Maassen ,  André Schreuder ,  Herman Marquart

IPC: H01L21/687 ,  G03F7/00

Abstract: A substrate holder including: a main body having a main body surface; a plurality of burls projecting from the main body surface and configured for supporting the substrate; and an edge seal projecting from the main body surface, wherein: the edge seal is spaced apart from the plurality of burls so as to define a gap therebetween, the gap having a width greater than or equal to about 75% of a pitch of the plurality of burls; the plurality of burls includes a first group of burls and a second group of burls surrounding the first group of burls; and the stiffness in the direction perpendicular to the support plane per unit area of the second group of burls is greater than or equal to about 150% of the stiffness in the direction perpendicular to the support plane per unit area of the first group of burls.