公开(公告)号：US10426020B2

公开(公告)日：2019-09-24

申请号：US15013930

申请日：2016-02-02

Applicant: ASML NETHERLANDS B.V.

Inventor： Peter M. Baumgart ,  John Martin Algots ,  Abhiram Govindaraju ,  Chirag Rajyaguru

IPC: H05G2/00 ,  F16C11/12 ,  G21K5/00 ,  G21K5/08

Abstract: Steering system for a droplet generator in a EUV system. The steering system permits controlled positioning of a droplet release point of the droplet generator. A movable member holding the droplet generator is coupled to stationary elements of the EUV system through a coupling system having a first subsystem that constrains lateral translation of the movable member, and a second subsystem that controls a relative inclination of the movable member. The first and second subsystems preferably include one or a combination of flexures that permit highly precise and repeatable positioning.