公开(公告)号：US20230259019A1

公开(公告)日：2023-08-17

申请号：US17920392

申请日：2021-03-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Kristof CUSTERS ,  Ron Geeraard Catharina DE BRUIJN ,  Matthias KRUIZINGA ,  Lodewijk Alexander SCHIJVENAARS

IPC: G03F1/64 ,  G03F1/22

CPC classification number: G03F1/64 ,  G03F1/22

Abstract: A pellicle frame includes: a first portion; and a plurality of second portions. The first portion is for connection to a border of a pellicle. The first portion includes a hollow and generally rectangular body. The plurality of second portions are for connection to a patterning device. The first portion and the plurality of second portions are all formed from a first material. Each of the second portions is connected to the first portion by a spring portion formed from the first material. Such a pellicle frame is advantageous since the first portion, the plurality of second portions and the spring portions are all formed from a same material.