公开(公告)号：US20210163338A1

公开(公告)日：2021-06-03

申请号：US17096278

申请日：2020-11-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Mingli Niu

IPC: C03B37/027

Abstract: A device for connecting a fiber preform including a plurality of elongate holes extending substantially parallel to a longitudinal axis of the fiber preform to a pressure supply system, the device including a first surface to be connected to an end face of the fiber preform where the plurality of elongate holes end, a second surface including at least two ports configured to be in fluid connection with the pressure supply system, and a channel system within the device connecting the plurality of elongate holes at the first surface to the at least two ports, wherein a density of the at least two ports at the second surface is smaller than a density of the plurality of corresponding elongate holes at the first surface.

公开(公告)号：US11780763B2

公开(公告)日：2023-10-10

申请号：US17096278

申请日：2020-11-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Mingli Niu

IPC: C03B37/027

CPC classification number: C03B37/02736 ,  C03B37/02781 ,  C03B2203/16 ,  C03B2203/42

Abstract: A device for connecting a fiber preform including a plurality of elongate holes extending substantially parallel to a longitudinal axis of the fiber preform to a pressure supply system, the device including a first surface to be connected to an end face of the fiber preform where the plurality of elongate holes end, a second surface including at least two ports configured to be in fluid connection with the pressure supply system, and a channel system within the device connecting the plurality of elongate holes at the first surface to the at least two ports, wherein a density of the at least two ports at the second surface is smaller than a density of the plurality of corresponding elongate holes at the first surface.