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公开(公告)号：US11215736B2
公开(公告)日：2022-01-04
申请号：US15038430
申请日：2015-01-29
Applicant: ASML NETHERLANDS B.V.
Inventor： Norbert Bowering
Abstract: A multilayer mirror having a cap with a multilayer structure including a top layer and a series of bilayers each having an absorber layer and a spacer layer, where the materials for the top layer, absorber layers, and spacer layers are chosen to resist blistering.
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2.发明申请公开(公告)号：US20160274466A1
公开(公告)日：2016-09-22
申请号：US15168431
申请日：2016-05-31
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Georgiy O. Vaschenko , Peter Baumgart , Norbert Bowering
CPC classification number: G03F7/70033 , C23C14/185 , H05G2/003 , H05G2/006 , H05G2/008
Abstract: A target material supply apparatus for an extreme ultraviolet (EUV) light source includes a tube that includes a first end, a second end, and a sidewall defined between the first and second ends. At least a portion of an outer surface of the tube includes an electrically insulating material, the first end receives a pressurized target material, and the second end defines an orifice through which the pressurized target material passes to produce a stream of target material droplets. The target material supply apparatus also includes an electrically conductive coating on the outer surface of the tube. The coating is configured to electrically connect the outer surface of the tube to ground to thereby reduce surface charge on the outer surface.
Abstract translation: 用于极紫外（EUV）光源的目标材料供应装置包括管，其包括限定在第一和第二端之间的第一端，第二端和侧壁。 管的外表面的至少一部分包括电绝缘材料，第一端容纳加压目标材料，第二端限定出加压目标材料通过的孔，以产生目标材料液滴流。 目标材料供应装置还包括在管的外表面上的导电涂层。 涂层被配置为将管的外表面电连接到地，从而减少外表面上的表面电荷。
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公开(公告)号：US09632418B2
公开(公告)日：2017-04-25
申请号：US15168431
申请日：2016-05-31
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Georgiy O. Vaschenko , Peter Baumgart , Norbert Bowering
CPC classification number: G03F7/70033 , C23C14/185 , H05G2/003 , H05G2/006 , H05G2/008
Abstract: A target material supply apparatus for an extreme ultraviolet (EUV) light source includes a tube that includes a first end, a second end, and a sidewall defined between the first and second ends. At least a portion of an outer surface of the tube includes an electrically insulating material, the first end receives a pressurized target material, and the second end defines an orifice through which the pressurized target material passes to produce a stream of target material droplets. The target material supply apparatus also includes an electrically conductive coating on the outer surface of the tube. The coating is configured to electrically connect the outer surface of the tube to ground to thereby reduce surface charge on the outer surface.
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4.发明授权公开(公告)号：US09392678B2
公开(公告)日：2016-07-12
申请号：US13652755
申请日：2012-10-16
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Georgiy O. Vaschenko , Peter Baumgart , Norbert Bowering
CPC classification number: G03F7/70033 , C23C14/185 , H05G2/003 , H05G2/006 , H05G2/008
Abstract: A target material supply apparatus for an extreme ultraviolet (EUV) light source includes a tube that includes a first end, a second end, and a sidewall defined between the first and second ends. At least a portion of an outer surface of the tube includes an electrically insulating material, the first end receives a pressurized target material, and the second end defines an orifice through which the pressurized target material passes to produce a stream of target material droplets. The target material supply apparatus also includes an electrically conductive coating on the outer surface of the tube. The coating is configured to electrically connect the outer surface of the tube to ground to thereby reduce surface charge on the outer surface.
Abstract translation: 用于极紫外（EUV）光源的目标材料供应装置包括管，其包括限定在第一和第二端之间的第一端，第二端和侧壁。 管的外表面的至少一部分包括电绝缘材料，第一端容纳加压目标材料，第二端限定出加压目标材料通过的孔，以产生目标材料液滴流。 目标材料供应装置还包括在管的外表面上的导电涂层。 涂层被配置为将管的外表面电连接到地，从而减少外表面上的表面电荷。
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