公开(公告)号：US12142451B2

公开(公告)日：2024-11-12

申请号：US17778579

申请日：2020-10-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Tianming Chen ,  Chiyan Kuan ,  Yixiang Wang ,  Zhi Po Wang

IPC: H01J37/02 ,  G03F7/00 ,  H01J37/28

Abstract: A system for grounding a mask using a grounding component are provided. Some embodiments of the system include a grounding component comprising a base and an extension protruding from the base and comprising a conductive prong configured to contact a conductive layer of the mask. Some embodiments of the system include a plurality of conductive prongs configured to contact multiple positions of a conductive layer of the mask. Some other embodiments of the system include an extension comprising various shapes.