公开(公告)号：US20240288747A1

公开(公告)日：2024-08-29

申请号：US18572750

申请日：2022-08-08

Applicant: ASML NETHERLANDS B.V.

Inventor： Mahesh Upendra AJGAONKAR ,  Amir ABDOLVAND ,  Willem Richard PONGERS ,  Johannes Jacobus Matheus BASELMANS ,  Yougfeng NI

IPC: G02F1/365 ,  G02F1/35

CPC classification number: G02F1/365 ,  G02F1/3528 ,  G02F2202/32

Abstract: Radiation source assembly and method for generating broadband radiation by spectral broadening. The radiation source assembly includes a pump assembly configured to provide broadband input radiation. The pump assembly includes a pump source configured to provide first radiation at a pump wavelength, and a broadband assembly configured to provide second radiation including a continuous wavelength range, wherein the first radiation and the second radiation form the broadband input radiation. The radiation source assembly further includes an optical fibre configured to receive the broadband input radiation. The optical fibre includes a core configured along at least a part of the length of the fibre to guide the received broadband input radiation during propagation through the fibre, so as to generate broadband radiation by spectral broadening to be output by the fibre.