公开(公告)号：US20180267415A1

公开(公告)日：2018-09-20

申请号：US15764617

申请日：2016-09-06

Applicant: ASML Netherlands B.V.

Inventor： Nitesh PANDEY ,  Arie Jeffrey DEN BOEF ,  Heine Melle MULDER ,  Willem Richard PONGERS ,  Paulus Antonius Andreas TEUNISSEN

IPC: G03F9/00

CPC classification number: G03F9/7084 ,  G03F7/70258 ,  G03F9/7049 ,  G03F9/7076 ,  G03F9/7092

Abstract: A topography measurement system comprising a radiation source configured to generate a radiation beam, a spatially coded grating configured to pattern the radiation beam and thereby provide a spatially coded radiation beam, optics configured to form an image of the spatially coded grating at a target location on a substrate, detection optics configured to receive radiation re-fleeted from the target location of the substrate and form an image of the grating image at a second grating, and a detector configured to receive radiation transmitted through the second grating and produce an output signal.

公开(公告)号：US20240004319A1

公开(公告)日：2024-01-04

申请号：US18039487

申请日：2021-11-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian UEBEL ,  Willem Richard PONGERS ,  Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GOTZ ,  Ludovicus VAN DEN OETELAAR

IPC: G03F9/00 ,  G03F7/00 ,  G02F1/35

CPC classification number: G03F9/7065 ,  G03F7/70625 ,  G03F7/70633 ,  G02F1/3528 ,  G02F1/365

Abstract: A radiation source for generating broadband radiation, the source including: a pump source having only one single fiber amplifier configured to generate pump radiation including a plurality of radiation pulses having a pulse energy of 2.5 μJ or less; and a hollow core fiber having a hollow core region and a cladding surrounding the hollow core region, the hollow core region having a pressurized gas therein, and the hollow core fiber being arranged to receive, at an input end, the pump radiation, wherein the hollow core region is dimensioned such that the radiation pulses have a soliton order higher than 16 so as to broaden a spectrum of the pump radiation using modulation instability as the pump radiation propagates along the hollow-core fiber, for providing output broadband radiation from an output end of the hollow core fiber.

公开(公告)号：US20220082949A1

公开(公告)日：2022-03-17

申请号：US17423325

申请日：2020-01-09

Applicant: ASML NETHERLANDS B.V.

Inventor： Arnaud HUBAUX ,  Johan Franciscus Maria BECKERS ,  Dylan John David DAVIES ,  Johan Gertrudis Cornelis KUNNEN ,  Willem Richard PONGERS ,  Ajinkya Ravindra DAWARE ,  Chung-Hsun LI ,  Georgios TSIROGIANNIS ,  Hendrik Cornelis Anton BORGER ,  Frederik Eduard DEJONG ,  Juan Manuel GONZALEZ HUESCA ,  Andriy HLOD ,  Maxim PISARENCO

IPC: G03F7/20 ,  G03F1/70 ,  G06F30/392

Abstract: A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.

公开(公告)号：US20240152024A1

公开(公告)日：2024-05-09

申请号：US18277821

申请日：2022-02-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Willem Richard PONGERS ,  Patrick Sebastian UEBEL ,  Johannes Richard Karl KOHLER

IPC: G02F1/365 ,  G02F1/35 ,  G03F7/00

CPC classification number: G02F1/365 ,  G02F1/3528 ,  G03F7/70166

Abstract: A radiation source including: a hollow core optical fiber having a body having a hollow core for confining a working medium, the hollow core optical fiber being operable to receive pulsed pump radiation such that the received pulsed pump radiation propagates through the hollow core from an input end to an output end of the hollow core optical fiber, wherein one or more source parameters of the radiation source are configured such that the pulsed pump radiation undergoes a soliton self-compression process so as to change a spectrum of the pulsed pump radiation to form output radiation; and at least one dispersion control mechanism being operable to change dispersion characteristics in a first portion of the optical fiber so as to spectrally shift a dispersive wave generated in the soliton self-compression process.

公开(公告)号：US20240142853A1

公开(公告)日：2024-05-02

申请号：US18280529

申请日：2022-02-09

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongfeng NI ,  Willem Richard PONGERS

IPC: G02F1/35 ,  G02F1/39

CPC classification number: G02F1/3532 ,  G02F1/3536 ,  G02F1/392 ,  G02F1/395 ,  G02F1/3528 ,  G02F2202/32

Abstract: A multiple wavelength light source device and associated method for generating output radiation that has a plurality of discrete output wavelength bands. The multiple wavelength light source device includes a pump radiation source arrangement configured to generate input radiation including at least a first frequency component and a second frequency component; and a hollow-core photonic crystal fiber configured to confine a working medium. The hollow-core photonic crystal fiber is configured to receive the input radiation and to generate the plurality of discrete output wavelength bands distributed over a wavelength range of interest via a seed-assisted cascaded four wave mixing (FWM) process in the working medium.

公开(公告)号：US20210215872A1

公开(公告)日：2021-07-15

申请号：US17128360

申请日：2020-12-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Hendrik SABERT ,  Patrick Sebastian UEBEL ,  Willem Richard PONGERS

IPC: G02B6/02

Abstract: A hollow-core photonic crystal fiber (HC-PCF) assembly for converting input radiation to broadband radiation, the hollow core fiber assembly including: a micro-structured fiber with a hollow core extending along a length of the fiber from an input end configured to receive input radiation to an output end configured to output broadband radiation, wherein the hollow core of the fiber is configured to include a medium; and a density control system configured to control a density profile of the medium along at least a part of the length of the fiber to establish a desired zero dispersion wavelength profile along at least a part of the length of the fiber.

公开(公告)号：US20240288747A1

公开(公告)日：2024-08-29

申请号：US18572750

申请日：2022-08-08

Applicant: ASML NETHERLANDS B.V.

Inventor： Mahesh Upendra AJGAONKAR ,  Amir ABDOLVAND ,  Willem Richard PONGERS ,  Johannes Jacobus Matheus BASELMANS ,  Yougfeng NI

IPC: G02F1/365 ,  G02F1/35

CPC classification number: G02F1/365 ,  G02F1/3528 ,  G02F2202/32

Abstract: Radiation source assembly and method for generating broadband radiation by spectral broadening. The radiation source assembly includes a pump assembly configured to provide broadband input radiation. The pump assembly includes a pump source configured to provide first radiation at a pump wavelength, and a broadband assembly configured to provide second radiation including a continuous wavelength range, wherein the first radiation and the second radiation form the broadband input radiation. The radiation source assembly further includes an optical fibre configured to receive the broadband input radiation. The optical fibre includes a core configured along at least a part of the length of the fibre to guide the received broadband input radiation during propagation through the fibre, so as to generate broadband radiation by spectral broadening to be output by the fibre.

公开(公告)号：US20240201561A1

公开(公告)日：2024-06-20

申请号：US18287160

申请日：2022-04-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian UEBEL ,  Willem Richard PONGERS ,  Ralph Jozef Johannes Gerardus Anna Maria SMEETS ,  Amir ABDOLVAND ,  Krishnaparvathy PUTHANKOVILAKAM

IPC: G02F1/365 ,  G02F1/35

CPC classification number: G02F1/365 ,  G02F1/3528

Abstract: A monolithic optical element for generating broadband radiation upon receiving input radiation at an input end of the optical element is disclosed, the optical element including: a hollow core region for guiding the input radiation along a longitudinal axis of the optical element towards an output end of the optical element; a cladding region surrounding the core region along the longitudinal axis and including transversally arranged micro-structures configured to provide non-linear optical behavior to the optical element causing the generation of the broadband radiation; and a supporting region surrounding the cladding region along the longitudinal axis of at least part of the optical element, wherein the supporting region has a transversal dimension which is sufficiently large to render the at least part of the optical element substantially rigid.

公开(公告)号：US20220244651A1

公开(公告)日：2022-08-04

申请号：US17625466

申请日：2020-06-15

Applicant: ASML Netherlands B.V.

Inventor： Andrey Valerievich ROGACHEVSKIY ,  Martin Jules Marie-Emile DE NIVELLE ,  Arjan GIJSBERTSEN ,  Willem Richard PONGERS ,  Viktor TROGRLIC

IPC: G03F9/00 ,  G03F7/20

Abstract: An apparatus for measuring a height of a substrate for processing in a lithographic apparatus is disclosed. The apparatus comprises a first sensor for sensing a height of the substrate over a first area. The apparatus also comprises a second sensor for sensing a height of the substrate over a second area. The apparatus further comprises a processor adapted to normalize first data corresponding to a signal from the first sensor with a second sensor footprint to produce a first normalized height data, and to normalize second data corresponding to a signal from the second sensor with a first sensor footprint to produce a second normalized height data. The processor is adapted to determine a correction to a measured height of the substrate based on a difference between the first and second normalized height data.