公开(公告)号：US20230005698A1

公开(公告)日：2023-01-05

申请号：US17778579

申请日：2020-10-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Tianming CHEN ,  Chiyan KUAN ,  Yixiang WANG ,  Zhi Po WANG

IPC: H01J37/02 ,  G03F7/20

Abstract: A system for grounding a mask using a grounding component are provided. Some embodiments of the system include a grounding component comprising a base and an extension protruding from the base and comprising a conductive prong configured to contact a conductive layer of the mask. Some embodiments of the system include a plurality of conductive prongs configured to contact multiple positions of a conductive layer of the mask. Some other embodiments of the system include an extension comprising various shapes.