公开(公告)号：US20220390861A1

公开(公告)日：2022-12-08

申请号：US17773003

申请日：2020-10-12

Applicant: ASML Holding N.V. ,  ASML Netherlands B.V.

Inventor： Ali ALSAQQA ,  Fadi EL-GHUSSEIN ,  Lambertus Gerardus Maria KESSELS ,  Roxana REZVANI NARAGHI ,  Krishanu SHOME ,  Timothy Allan BRUNNER ,  Sergei SOKOLOV

IPC: G03F9/00

Abstract: A calibration system includes a plate, a fixed alignment mark, and a variable diffraction grating. The plate is adjacent to a wafer alignment mark disposed on a wafer. The fixed alignment mark is disposed on the plate and is configured to act as a reference mark for an initial calibration of the calibration system. The variable diffraction grating is disposed on the plate and includes a plurality of unit cells configured to form a plurality of variable alignment marks. The variable diffraction grating is configured to calibrate a shift-between-orders of one of the variable alignment marks and the fixed alignment mark.

公开(公告)号：US20240134182A1

公开(公告)日：2024-04-25

申请号：US18273478

申请日：2022-01-12

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Ali ALSAQQA ,  Patrick Sebastian UEBEL ,  Paulus Antonius Andreas TEUNISSEN

IPC: G02B26/08 ,  G02B27/09

CPC classification number: G02B26/0816 ,  G02B27/0977

Abstract: An optical filter apparatus including an optical divergence device, operable to receive optical pulses and spatially distribute the optical pulses over an optical plane in dependence with a pulse energy of each of the optical pulses; and a spatial filter, located at the optical plane, operable to apply spatial filtering to the optical pulses based on a location of each of the optical pulses at the optical plane resulting from the spatial distributing.

公开(公告)号：US20240004308A1

公开(公告)日：2024-01-04

申请号：US18021905

申请日：2021-08-03

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Ali ALSAQQA ,  Aabid PATEL ,  Patrick Sebastian UEBEL ,  Amir ABDOLVAND ,  Paulus Antonius Andreas TEUNISSEN ,  Wisham F. KADHIM

IPC: G03F7/00 ,  G02F1/35

CPC classification number: G03F7/70625 ,  G02F1/3523 ,  G03F7/70041 ,  G03F7/70558

Abstract: A radiation source arrangement including: a radiation source operable to generate source radiation including source energy pulses; and at least one non-linear energy-filter operable to filter the source radiation to obtain filtered radiation including filtered energy pulses. The at least one non-linear energy-filter is operable to mitigate variation in energy in the filtered radiation by reducing the energy level of the source energy pulses which have an energy level corresponding to one of both extremities of an energy distribution of the source energy pulses by a greater amount than the source energy pulses which have an energy level corresponding to a peak of the energy distribution.