公开(公告)号：US20220172347A1

公开(公告)日：2022-06-02

申请号：US17608015

申请日：2020-04-02

Applicant: ASML Netherlands B.V.

Inventor： Teunis Willem TUKKER ,  Arie Jefrey DEN BOEF ,  Nitesh PANDEY ,  Marinus Petrus REIJNDERS ,  Ferry ZIJP

IPC: G06T7/00 ,  G02B5/30 ,  G02B27/42 ,  G02B27/28 ,  H04N5/225 ,  H04N5/232

Abstract: Disclosed is a detection apparatus for simultaneous acquisition of multiple images of an object at a plurality of different focus levels; comprising: a modulator for obtaining multiple beam copies of an incoming beam; and a detector operable to capture said multiple beam copies, such that at two of said multiple beam copies are captured at different focus levels. Also disclosed is an inspection apparatus comprising such a detection system.