公开(公告)号：US20200333717A1

公开(公告)日：2020-10-22

申请号：US16763487

申请日：2018-11-07

申请人： ASML Netherlands B.V.

发明人： Yang-Shan HUANG ,  Pieter Cornelis Johan DE JAGER ,  Rob REILINK ,  Christiaan Louis VALENTIN ,  Jasper Leonardus Johannes SCHOLTEN ,  Antonie Hendrik VERWEIJ ,  Edwin VAN HORNE

IPC分类号： G03F7/20 ,  F16C29/02

摘要： An object stage bearing system can include an object stage, a hollow shaft coupled to the object stage, and an in-vacuum gas bearing assembly coupled to the hollow shaft and the object stage. The in-vacuum gas bearing assembly can include a gas bearing, a scavenging groove, and a vacuum groove. The gas bearing is disposed along an inner wall of the in-vacuum gas bearing assembly and along an external wall of the hollow shaft. The scavenging groove is disposed along the inner wall such that the scavenging groove is isolated from the gas bearing. The vacuum groove is disposed along the inner wall such that the vacuum groove is isolated from the scavenging groove and the gas bearing.

公开(公告)号：US20210080840A1

公开(公告)日：2021-03-18

申请号：US17050240

申请日：2019-03-21

申请人： ASML Netherlands B.V.

发明人： Peter Michel Silvester Maria HEIJMANS ,  Olof Martinus Josephus FISCHER ,  Maarten Hartger KIMMAN ,  Edwin VAN HORNE ,  Antonie Hendrik VERWEIJ

IPC分类号： G03F7/20 ,  H02K41/03

摘要： The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.