公开(公告)号：US11740565B2

公开(公告)日：2023-08-29

申请号：US17784951

申请日：2020-12-09

Applicant: ASML Netherlands B.V.

Inventor： Taylor John Hartung ,  Yue Ma ,  Marc Guy Langlois ,  Jeremy Burke ,  Esteban Joseph Sandoval Johnson

IPC: G03F7/20 ,  G03F7/00

CPC classification number: G03F7/70916 ,  G03F7/70033 ,  G03F7/7085 ,  G03F7/70808

Abstract: Systems, apparatuses, and methods are provided for a collector flow ring (CFR) housing configured to mitigate an accumulation of fuel debris in an extreme ultraviolet (EUV) radiation system. An example CFR housing can include a plurality of showerhead flow channel outlets configured to output a plurality of first gaseous fluid flows over a plurality of portions of a plasma-facing surface of the CFR housing. The example CFR housing can further include a gutter purge flow channel outlet configured to output a second gaseous fluid flow over a fuel debris-receiving surface of the CFR housing. The example CFR housing can further include a shroud mounting structure configured to support a shroud assembly, a cooling flow channel configured to transport a fluid, and a plurality of optical metrology ports configured to receive a plurality of optical metrology tubes.

公开(公告)号：US20230010251A1

公开(公告)日：2023-01-12

申请号：US17784951

申请日：2020-12-09

Applicant: ASML Netherlands B.V.

Inventor： Taylor John Hartung ,  Yue Ma ,  Marc Guy Langlois ,  Jeremy Burke ,  Esteban Joseph Sandoval Johnson

IPC: G03F7/20

Abstract: Systems, apparatuses, and methods are provided for a collector flow ring (CFR) housing configured to mitigate an accumulation of fuel debris in an extreme ultraviolet (EUV) radiation system. An example CFR housing can include a plurality of showerhead flow channel outlets configured to output a plurality of first gaseous fluid flows over a plurality of portions of a plasma-facing surface of the CFR housing. The example CFR housing can further include a gutter purge flow channel outlet configured to output a second gaseous fluid flow over a fuel debris-receiving surface of the CFR housing. The example CFR housing can further include a shroud mounting structure configured to support a shroud assembly, a cooling flow channel configured to transport a fluid, and a plurality of optical metrology ports configured to receive a plurality of optical metrology tubes.