公开(公告)号：US20210165336A1

公开(公告)日：2021-06-03

申请号：US17048834

申请日：2019-04-10

Applicant: ASML Netherlands B.V.

Inventor： Ramon Mark HOFSTRA ,  Andrey Sergeevich TYCHKOV ,  Francois Charles Dominique DENEUVILLE ,  Gerardus Hubertus Petrus Maria SWINKELS ,  Petrus Adrianu Theodorus Maria RUIJS

IPC: G03F7/20 ,  G02B27/14

Abstract: A system comprises a reflective optical element with a reflective surface that is configured to reflect a radiation beam. The reflective optical element also has a body. The system includes a thermal conditioning mechanism operative to thermally induce a deformation of the body under control of a controller. By means of controllably deforming the body, the shape of the reflective surface can be adjusted in a controlled manner.