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公开(公告)号：US20170361359A1
公开(公告)日：2017-12-21
申请号：US15690707
申请日：2017-08-30
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Chunguang Xia , Gregory James Wilson , Brandon Wilson Verhoff
CPC classification number: B08B5/02 , G01F1/00 , G03F7/70925 , G03F7/70933
Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
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公开(公告)号：US20170036252A1
公开(公告)日：2017-02-09
申请号：US14937973
申请日：2015-11-11
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Chunguang Xia , Gregory James Wilson , Brandon Wilson Verhoff
CPC classification number: B08B5/02 , G01F1/00 , G03F7/70925 , G03F7/70933
Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
Abstract translation: 基于第一流动图案将流体引导到光学元件的表面，光学元件的表面包括碎屑，并且基于第一流动图案指向的流体将至少一些碎片移动到第一停滞区域 光学元件的表面; 并且基于第二流动图案将流体引向光学元件，基于第二流动图案指向的流体将至少一些碎片移动到光学元件的表面上的第二停滞区域，第二停滞区域和 第一停滞区域是在光学元件的表面处不同的位置。 基于第二流动模式将流体引导到光学元件的表面去除了来自第一停滞区域的至少一些碎屑。
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公开(公告)号：US10232413B2
公开(公告)日：2019-03-19
申请号：US15690707
申请日：2017-08-30
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Chunguang Xia , Gregory James Wilson , Brandon Wilson Verhoff
Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
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公开(公告)号：US09776218B2
公开(公告)日：2017-10-03
申请号：US14937973
申请日：2015-11-11
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Chunguang Xia , Gregory James Wilson , Brandon Wilson Verhoff
CPC classification number: B08B5/02 , G01F1/00 , G03F7/70925 , G03F7/70933
Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
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