公开(公告)号：US20160334718A1

公开(公告)日：2016-11-17

申请号：US15109427

申请日：2014-12-18

Applicant: ASML Netherlands B.V.

Inventor： Hans BUTLER ,  Cornelius Adrianus Lambertus DE HOON ,  INgmar August KERP ,  Pieter Johannes Gertrudis MEIJERS ,  Jeroen Pieter STARREVELD ,  Derk TEN HOOPEN ,  Martinus VAN DUIJNHOVEN ,  Edward HAGE ,  Evert Hendrik Jan DRAAIJER ,  Wesley OOMS

IPC: G03F7/20

CPC classification number: G03F7/70866 ,  F16F15/0232 ,  G03F7/70733 ,  G03F7/70833 ,  G03F7/709

Abstract: A support device configured to support a first part relative to a second part, minimizing the transfer of vibration between the two parts, includes a supporting system configured to use gas under pressure to provide a support force between the first and second parts; a gas chamber connected to the supporting system and configured to contain the gas under pressure and provide the gas under pressure to the supporting system; and a section of acoustic damping material, arranged at a location within the gas chamber so as to separate a first gas containing region and a second gas containing region within the gas chamber, wherein the section of acoustic damping material has a first side and a second side, wherein the first gas containing region is on the first side and the second gas containing region is on the second side.

Abstract translation: 支撑装置，被配置为相对于第二部分支撑第一部分，最小化两个部分之间的振动传递，包括构造成在压力下使用气体以在第一和第二部分之间提供支撑力的支撑系统; 连接到支撑系统并被配置为容纳处于压力下的气体并将气体提供给支撑系统的气体室; 以及一部分声阻尼材料，其布置在所述气体室内的位置处，以分离所述气体室内的第一气体容纳区域和第二气体容纳区域，其中所述声学阻尼材料部分具有第一侧面和第二侧面 其中所述第一气体容纳区域在所述第一侧上且所述第二气体容纳区域位于所述第二侧。