公开(公告)号：US20240006147A1

公开(公告)日：2024-01-04

申请号：US18369619

申请日：2023-09-18

Applicant: ASML Netherlands B.V.

Inventor： Christiaan OTTEN ,  Christan TEUNISSEN ,  Paul Hendricus SCHEEPERS ,  Joseph Reinier MEIJER

IPC: H01J37/12 ,  H01J37/02 ,  H01J37/09

CPC classification number: H01J37/12 ,  H01J37/026 ,  H01J2237/0206 ,  H01J2237/0475 ,  H01J37/09

Abstract: Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body arranged along the beam path; a lens arrangement arranged in a down-beam part of the flood column; and a lens support arranged between the anchor body and the lens arrangement; wherein the lens support is configured to position the lens arrangement and the anchor body relative to each other; the lens support comprises an electrical insulator; and the lens support is in the direct line of sight of at least a portion of the beam path in the down-beam part.