公开(公告)号：US12288663B2

公开(公告)日：2025-04-29

申请号：US18155684

申请日：2023-01-17

Applicant: ASML Netherlands B.V.

Inventor： Laura Dinu-Gurtler ,  Eric Petrus Hogervorst ,  Jurgen Van Soest

IPC: H01J37/04 ,  G03F7/00 ,  H01J37/10 ,  H01J37/244 ,  H01J37/317 ,  H01L21/263

Abstract: The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged particle source arrangement for generating a charged particle beam, such as an electron beam, wherein said charged particle source arrangement, such as an electron source, is arranged at said second frame part; and a power connecting assembly arranged at said first frame part, wherein said charged particle source arrangement is electrically connected to said connecting assembly via electrical wiring.

公开(公告)号：US12028000B2

公开(公告)日：2024-07-02

申请号：US18132617

申请日：2023-04-10

Applicant: ASML Netherlands B.V.

Inventor： Jan-Gerard Cornelis Van Der Toorn ,  Jeroen Gertruda Antonius Huinck ,  Han Willem Hendrik Severt ,  Allard Eelco Kooiker ,  Michael Johannes Christiaan Ronde ,  Arno Maria Wellink ,  Shibing Liu ,  Ying Luo ,  Yixiang Wang ,  Chia-Yao Chen ,  Bohang Zhu ,  Jurgen Van Soest

IPC: H02N13/00 ,  G03F7/00

CPC classification number: H02N13/00 ,  G03F7/70708 ,  G03F7/70716

Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.

公开(公告)号：US11637512B2

公开(公告)日：2023-04-25

申请号：US17351181

申请日：2021-06-17

Applicant: ASML Netherlands B.V.

Inventor： Jan-Gerard Cornelis Van Der Toorn ,  Jeroen Gertruda Antonius Huinck ,  Han Willem Hendrik Severt ,  Allard Eelco Kooiker ,  Michaël Johannes Christiaan Ronde ,  Arno Maria Wellink ,  Shibing Liu ,  Ying Luo ,  Yixiang Wang ,  Chia-Yao Chen ,  Bohang Zhu ,  Jurgen Van Soest

IPC: H02N13/00 ,  G03F7/20

Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.

公开(公告)号：US11557455B2

公开(公告)日：2023-01-17

申请号：US16600364

申请日：2019-10-11

Applicant: ASML Netherlands B.V.

Inventor： Laura Dinu-Gurtler ,  Eric Petrus Hogervorst ,  Jurgen Van Soest

IPC: H01J37/04 ,  H01J37/10 ,  G03F7/20 ,  H01J37/244 ,  H01J37/317 ,  H01L21/263

Abstract: The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged particle source arrangement for generating a charged particle beam, such as an electron beam, wherein said charged particle source arrangement, such as an electron source, is arranged at said second frame part; and a power connecting assembly arranged at said first frame part, wherein said charged particle source arrangement is electrically connected to said connecting assembly via electrical wiring.