公开(公告)号：US20240201486A1

公开(公告)日：2024-06-20

申请号：US18556801

申请日：2022-03-31

Applicant: ASML Netherlands B.V.

Inventor： Krishanu SHOME ,  Scott Douglas COSTON ,  Kan DU

IPC: G02B27/00 ,  G03F7/00 ,  G03F7/16

CPC classification number: G02B27/0025 ,  G03F7/168 ,  G03F7/70266 ,  G03F7/70325 ,  G03F7/706

Abstract: A method includes determining optical aberrations of an optical system, identifying an illumination profile that compensates for the optical aberrations of the optical system, and curing a layer of optical cement of an optical device using a modulated energy beam to achieve the identified illumination profile.