公开(公告)号：US20240055221A1

公开(公告)日：2024-02-15

申请号：US18257736

申请日：2021-12-13

Applicant: ASML Netherlands B.V.

Inventor： Jan Louis SUNDERMEYER ,  Leonhard Martin KLEIN ,  Matthias OBERST ,  Harald Gert Helmut NEUBAUER

IPC: H01J37/244

CPC classification number: H01J37/244 ,  H01J2237/24495

Abstract: An improved readout circuit for a charged particle detector and a method for operating the readout circuit are disclosed. An improved circuit comprises an amplifier configured to receive a signal representing an output of a sensor layer and comprising a first input terminal and an output terminal, a capacitor connected between the first input terminal and the output terminal, and a resistor connected in parallel with the capacitor between the first input terminal and the output terminal. The circuit can be configured to operate in a first mode and a second mode. The capacitor can be adjustable using a capacitance value of the capacitor to enable control of a gain of the circuit operating in the first mode and control of a bandwidth of the circuit operating in the second mode.