公开(公告)号：US10149374B1

公开(公告)日：2018-12-04

申请号：US15687367

申请日：2017-08-25

Applicant: ASML Netherlands B.V.

Inventor： Armin Bernhard Ridinger ,  Kyle John Scaffidi ,  Michael Arthur Perry, Jr.

IPC: H05G2/00

Abstract: A target material receptacle includes a structure including a passageway that extends in a first direction, the passageway configured to receive target material that travels along a target material path; and a deflector system configured to receive target material from the passageway. The deflector system includes a plurality of deflector elements. Each deflector element is oriented at a first acute angle relative to a direction of travel of an instance of the target material that travels along the target material path, and each deflector element in the deflector system is separated from a nearest deflector element by a distance along a second direction that is different from the first direction.