公开(公告)号：US10149374B1

公开(公告)日：2018-12-04

申请号：US15687367

申请日：2017-08-25

Applicant: ASML Netherlands B.V.

Inventor： Armin Bernhard Ridinger ,  Kyle John Scaffidi ,  Michael Arthur Perry, Jr.

IPC: H05G2/00

Abstract: A target material receptacle includes a structure including a passageway that extends in a first direction, the passageway configured to receive target material that travels along a target material path; and a deflector system configured to receive target material from the passageway. The deflector system includes a plurality of deflector elements. Each deflector element is oriented at a first acute angle relative to a direction of travel of an instance of the target material that travels along the target material path, and each deflector element in the deflector system is separated from a nearest deflector element by a distance along a second direction that is different from the first direction.

公开(公告)号：US20230156898A1

公开(公告)日：2023-05-18

申请号：US17920620

申请日：2021-04-08

Applicant: ASML Netherlands B.V.

Inventor： Armin Bernhard Ridinger ,  Kyle John Scaffidi ,  Nicolas John Ledesma ,  Thomas Halloran

IPC: H05G2/00 ,  F16L51/02 ,  F16L59/08

CPC classification number: H05G2/005 ,  F16L51/026 ,  F16L59/08

Abstract: An apparatus includes: a mechanically insulating device including a flexible bellows (315) extending between first and second flanges (325, 330) and defining a bellows passageway that extends along an axial direction between openings of the first and second flanges; a rigid inner sleeve (335) affixed to or supported by the first flange and extending along the bellows passageway in the axial direction; and a shield device (340 including i.a. 342, 344). The rigid inner sleeve has an outer diameter that is less than an inner diameter of the flexible bellows. The shield device is at least partly fixed to or supported by the second flange and defines an axial device opening having a diameter that is less than the inner diameter of the flexible bellows and is greater than the outer diameter of the rigid inner sleeve. The shield device is configured to block particulates from entering a region between the flexible bellows and the rigid inner sleeve.