公开(公告)号：US09844804B2

公开(公告)日：2017-12-19

申请号：US14737590

申请日：2015-06-12

Applicant: ASML Netherlands B.V.

Inventor： Silvia De Dea ,  Michael Varga ,  Alexander I. Ershov ,  Robert L. Morse

IPC: A47B96/06 ,  B08B11/02 ,  G03F7/20 ,  B08B3/02 ,  G02B27/00 ,  B23K26/06 ,  B23K26/16

CPC classification number: B08B11/02 ,  B08B3/02 ,  B23K26/0643 ,  B23K26/16 ,  G02B27/0006 ,  G03F7/70925

Abstract: A carrier holds an extreme ultraviolet light source collector mirror. The carrier includes a front panel having an inner surface and an outer surface opposite the inner surface, and defining a through opening that has an edge having a plurality of scallops; a back panel having an inner surface that faces the front panel and an outer surface opposite the inner surface; and a plurality of posts that are configured to connect the back panel to the front panel and to sandwich a flat rim around the circular boundary of the collector mirror between the inner surface of one of the panels and flanges of the posts. The scallops are positioned around a circumference of the edge and being separated by arcs, where the arcs define a circle that has a diameter that is less than a diameter of the circular boundary of the reflective surface of the collector mirror.

公开(公告)号：US20150273542A1

公开(公告)日：2015-10-01

申请号：US14737590

申请日：2015-06-12

Applicant: ASML Netherlands B.V.

Inventor： Silvia De Dea ,  Michael Varga ,  Alexander I. Ershov ,  Robert L. Morse

IPC: B08B11/02 ,  G02B27/00 ,  G03F7/20 ,  B08B3/02

CPC classification number: B08B11/02 ,  B08B3/02 ,  B23K26/0643 ,  B23K26/16 ,  G02B27/0006 ,  G03F7/70925

Abstract: A carrier holds an extreme ultraviolet light source collector mirror. The carrier includes a front panel having an inner surface and an outer surface opposite the inner surface, and defining a through opening that has an edge having a plurality of scallops; a back panel having an inner surface that faces the front panel and an outer surface opposite the inner surface; and a plurality of posts that are configured to connect the back panel to the front panel and to sandwich a flat rim around the circular boundary of the collector mirror between the inner surface of one of the panels and flanges of the posts. The scallops are positioned around a circumference of the edge and being separated by arcs, where the arcs define a circle that has a diameter that is less than a diameter of the circular boundary of the reflective surface of the collector mirror.

Abstract translation: 载体保持极紫外光源收集镜。 载体包括具有内表面和与内表面相对的外表面的前面板，并且限定具有多个扇形边缘的通孔; 背面板，其具有面向所述前面板的内表面和与所述内表面相对的外表面; 以及多个柱，其被构造成将所述后面板连接到所述前面板，并且在所述面板的内表面和所述柱的凸缘之间夹住围绕所述收集镜的圆形边界的平坦边缘。 扇形围绕边缘的圆周定位并且被圆弧分隔开，其中圆弧限定圆直径小于收集器反射镜的反射表面的圆形边界的直径。