公开(公告)号：US20240096589A1

公开(公告)日：2024-03-21

申请号：US18038206

申请日：2021-10-26

Applicant: ASML Netherlands B.V.

Inventor： Stoyan NIHTIANOV ,  Kenichi KANAI ,  Padmakumar RAMACHANDRA RAO

IPC: H01J37/244

CPC classification number: H01J37/244 ,  H01J2237/2441 ,  H01J2237/2446 ,  H01J2237/24495

Abstract: A detector may be provided for a charged particle apparatus comprising:



a sensing element including a diode; and
a circuit configured to detect an electron event caused by an electron impacting the sensing element,
wherein the circuit comprises a voltage monitoring device and a reset device,
wherein the reset device is configured to regularly reset the diode by setting a voltage across the diode to a predetermined value,

and wherein the voltage monitoring device is connected to the diode to monitor a voltage across the diode in between resets.