公开(公告)号：US20170291196A1

公开(公告)日：2017-10-12

申请号：US15092293

申请日：2016-04-06

Applicant: ASML Netherlands B.V.

Inventor： Armin Bernhard Ridinger ,  Georgiy O. Vaschenko ,  Chirag Rajyaguru ,  Peter Michael Baumgart ,  Timothy Richard Palmer

IPC: B08B3/02

CPC classification number: B08B3/02 ,  B01D29/336 ,  B01D29/68 ,  B01D41/04 ,  B08B9/00

Abstract: A system and method for cleaning a sintered filter includes a cleaning fluid source and a cleaning nozzle. The cleaning nozzle includes an inlet end coupled to the cleaning fluid source and at least one outlet port for outputting the cleaning fluid injected through the cleaning nozzle. The outlet port is disposed proximate to an outlet end of the cleaning nozzle. The cleaning nozzle has an external width less than an internal width of the sintered filter to be cleaned. The cleaning nozzle has a nozzle length greater than a full depth of the sintered filter to be cleaned. The outlet port can be disposed in a side of the cleaning nozzle proximate to the outlet end of the cleaning nozzle. The outlet port can include more than one outlet ports.

公开(公告)号：US10481498B2

公开(公告)日：2019-11-19

申请号：US16061847

申请日：2016-12-15

Applicant: ASML Netherlands B.V.

Inventor： Johan Frederik Dijksman ,  Bastiaan Lambertus Wilhelmus Marinus van de Ven ,  Koen Gerhardus Winkels ,  Theodorus Wilhelmus Driessen ,  Georgiy O. Vaschenko ,  Peter Michael Baumgart ,  Wilhelmus Henricus Theodorus Maria Aangenent ,  Jan Okke Nieuwenkamp ,  Wim Ronald Kampinga ,  Jari Ruotsalainen

IPC: G03F7/20 ,  H05G2/00

Abstract: Droplet generators, such as used in an EUV radiation source, and associated EUV radiation sources and lithographic apparatuses. A droplet generator can include a nozzle assembly to emit the fuel as droplets, the nozzle assembly being within a pressurized environment at substantially the same pressure as the fuel pressure within the droplet generator. A droplet generator can include an actuator in contact with and biased against a pump chamber by means of a biasing mechanism having an actuator support biased against the actuator. The actuator acts on the fuel within the pump chamber to create droplets. The actuator support has a material with a greater coefficient of thermal expansion than its surrounding structure, such that it is moveable within the surrounding structure at ambient temperature, but expands against the surrounding structure at an operating temperature, so as to clamp the actuator support against the surrounding structure at the operating temperature.

公开(公告)号：US20180364580A1

公开(公告)日：2018-12-20

申请号：US16061847

申请日：2016-12-15

Applicant: ASML Netherlands B.V.

Inventor： Johan Frederik Dijksman ,  Bastiaan Lambertus Wilhelmus Marinus van de Ven ,  Koen Gerhardus Winkels ,  Theodorus Wilhelmus Driessen ,  Georgiy O. Vaschenko ,  Peter Michael Baumgart ,  Wilhelmus Henricus Theodorus Maria Aangenent ,  Jan Okke Nieuwenkamp ,  Wim Ronald Kampinga ,  Jari Ruotsalainen

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/006 ,  H05G2/008

Abstract: Droplet generators, such as used in an EUV radiation source, and associated EUV radiation sources and lithographic apparatuses. A droplet generator can include a nozzle assembly to emit the fuel as droplets, the nozzle assembly being within a pressurized environment at substantially the same pressure as the fuel pressure within the droplet generator. A droplet generator can include an actuator in contact with and biased against a pump chamber by means of a biasing mechanism having an actuator support biased against the actuator. The actuator acts on the fuel within the pump chamber to create droplets. The actuator support has a material with a greater coefficient of thermal expansion than its surrounding structure, such that it is moveable within the surrounding structure at ambient temperature, but expands against the surrounding structure at an operating temperature, so as to clamp the actuator support against the surrounding structure at the operating temperature.