公开(公告)号：US20230156898A1

公开(公告)日：2023-05-18

申请号：US17920620

申请日：2021-04-08

Applicant: ASML Netherlands B.V.

Inventor： Armin Bernhard Ridinger ,  Kyle John Scaffidi ,  Nicolas John Ledesma ,  Thomas Halloran

IPC: H05G2/00 ,  F16L51/02 ,  F16L59/08

CPC classification number: H05G2/005 ,  F16L51/026 ,  F16L59/08

Abstract: An apparatus includes: a mechanically insulating device including a flexible bellows (315) extending between first and second flanges (325, 330) and defining a bellows passageway that extends along an axial direction between openings of the first and second flanges; a rigid inner sleeve (335) affixed to or supported by the first flange and extending along the bellows passageway in the axial direction; and a shield device (340 including i.a. 342, 344). The rigid inner sleeve has an outer diameter that is less than an inner diameter of the flexible bellows. The shield device is at least partly fixed to or supported by the second flange and defines an axial device opening having a diameter that is less than the inner diameter of the flexible bellows and is greater than the outer diameter of the rigid inner sleeve. The shield device is configured to block particulates from entering a region between the flexible bellows and the rigid inner sleeve.