公开(公告)号：US10809634B2

公开(公告)日：2020-10-20

申请号：US15921124

申请日：2018-03-14

Applicant: ASML Netherlands B.V.

Inventor： Peter Paul Hempenius ,  Marcel Koenraad Marie Baggen ,  Thomas Jan De Hoog ,  Sinar Juliana ,  Henricus Martinus Johannes Van De Groes

IPC: G03B27/58 ,  G03F7/20 ,  G01N21/95 ,  G01N21/47

Abstract: Disclosed is a stage system and metrology apparatus comprising at least one such stage system. The stage system comprises a stage carrier for holding an object and a stage carrier positioning actuator for displacing the stage carrier. The stage system also comprises a balance mass to counteract a displacement of the stage carrier, and a balance mass positioning actuator for displacing the balance mass. A cable arrangement is connected to the stage carrier for the supply of at least power to said stage carrier. The stage system is operable to apply a compensatory feed-forward force to the balance mass which compensates for a cable arrangement force exerted by the cable arrangement.