公开(公告)号：US20230162944A1

公开(公告)日：2023-05-25

申请号：US17916785

申请日：2021-03-31

Applicant: ASML Netherlands B.V.

Inventor： Xiang WANG ,  Steffen MEYER ,  Mark O'MAHONY

IPC: H01J37/22 ,  H01J37/28

CPC classification number: H01J37/222 ,  H01J37/28 ,  H01J2237/2817 ,  H01J2237/2809 ,  H01J2237/0044 ,  H01J2237/282

Abstract: An improved method and apparatus for enhancing an inspection image in a charged-particle beam inspection system. An improved method for enhancing an inspection image comprises acquiring a plurality of test images of a sample that are obtained at different landing energies, determining distortion levels for the plurality of test images, determining a landing energy level that enables the sample to be in a neutral charge condition during inspection based on the distortion levels, and acquiring an inspection image based on the determined landing energy level.