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公开(公告)号：US11562884B2
公开(公告)日：2023-01-24
申请号：US16852325
申请日：2020-04-17
Applicant: ASML Netherlands B.V.
Inventor： Yixiang Wang , Yanqiu Wang , Xiaodong He , Guofan Ye
IPC: H01J37/24 , H01J37/141
Abstract: Disclosed among other aspects is a power supply such as may be used in a charged particle inspection system. The power supply includes a direct current source such as a programmable linear current source connected to a controlled voltage source where the control signal for the controlled voltage source is derived from a measured voltage drop across the direct current source.
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