公开(公告)号：US09798251B2

公开(公告)日：2017-10-24

申请号：US14772721

申请日：2014-02-26

Applicant: ASML Netherlands B.V.

Inventor： Raymond Wilhelmus Louis LaFarre ,  Satish Achanta ,  Matteo Filippi ,  Yogesh Karade ,  Antonius Johannes Maria Nellissen ,  Ronald Van Der Wilk ,  Hendrikus Christoffel Maria Van Doremalen ,  Wilhelmus Jacobus Johannes Welters

IPC: G03B27/58 ,  G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/70708

Abstract: A method of manufacturing an object holder for use in a lithographic apparatus, the object holder including one or more electrically functional components, the method including: using a composite structure including a carrier sheet different from a main body of the object holder and a layered structure including one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.