公开(公告)号：US08268645B2

公开(公告)日：2012-09-18

申请号：US13331909

申请日：2011-12-20

申请人： Adam Kell ,  Robert Clark-Phelps ,  Joseph D. Gillespie ,  Gopal Prabhu ,  Takao Sakase ,  Theodore H. Smick ,  Steve Zuniga ,  Steve Bababyan

发明人： Adam Kell ,  Robert Clark-Phelps ,  Joseph D. Gillespie ,  Gopal Prabhu ,  Takao Sakase ,  Theodore H. Smick ,  Steve Zuniga ,  Steve Bababyan

IPC分类号： H01L21/00 ,  H02N6/00

CPC分类号： H01L31/0288 ,  H01L21/67092 ,  H01L21/6838 ,  H01L31/0747 ,  H01L31/1892 ,  Y02E10/50

摘要： A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and heating the donor body to an implant temperature during implanting. The donor body is separably contacted with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body by applying a thermal profile to the donor body. Implantation and exfoliation conditions may be adjusted in order to maximize the defect-free area of the lamina.

摘要翻译： 用于从施主实体产生层的方法包括：在植入期间，将施主体以离子剂量植入，并将施主体加热至植入温度。 施主体与供体体和基座组件直接接触的基座组件分离接触。 通过向施主体施加热分布，使薄片从供体体剥离。 可以调整植入和剥脱条件以最大化层的无缺陷区域。

公开(公告)号：US08435804B2

公开(公告)日：2013-05-07

申请号：US13331915

申请日：2011-12-20

申请人： Adam Kell ,  Robert Clark-Phelps ,  Joseph D. Gillespie ,  Gopal Prabhu ,  Takao Sakase ,  Theodore H. Smick ,  Steve Zuniga ,  Steve Bababyan

发明人： Adam Kell ,  Robert Clark-Phelps ,  Joseph D. Gillespie ,  Gopal Prabhu ,  Takao Sakase ,  Theodore H. Smick ,  Steve Zuniga ,  Steve Bababyan

IPC分类号： H01L21/00 ,  H01L31/0224

CPC分类号： H01L31/0288 ,  H01L21/67092 ,  H01L21/67132 ,  H01L21/6838 ,  H01L31/0747 ,  H01L31/1892 ,  Y02E10/50 ,  Y10T156/11 ,  Y10T156/1132

摘要： A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and separably contacting the donor body with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body, and a deforming force is applied to the lamina or to the donor body to separate the lamina from the donor body.

摘要翻译： 用于从施主体产生层的方法包括用离子剂量植入施主体，并将施主体与供体体和基座组件直接接触的基座组件分离接触。 薄片从供体体剥离，并且将变形力施加到椎板或施主体以将椎板与供体体分开。

公开(公告)号：US20120171809A1

公开(公告)日：2012-07-05

申请号：US13331909

申请日：2011-12-20

申请人： Adam Kell ,  Robert Clark-Phelps ,  Joseph D. Gillespie ,  Gopal Prabhu ,  Takao Sakase ,  Theodore H. Smick ,  Steve Zuniga ,  Steve Bababyan

发明人： Adam Kell ,  Robert Clark-Phelps ,  Joseph D. Gillespie ,  Gopal Prabhu ,  Takao Sakase ,  Theodore H. Smick ,  Steve Zuniga ,  Steve Bababyan

IPC分类号： H01L31/0376 ,  H01L21/762

CPC分类号： H01L31/0288 ,  H01L21/67092 ,  H01L21/6838 ,  H01L31/0747 ,  H01L31/1892 ,  Y02E10/50

摘要： A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and heating the donor body to an implant temperature during implanting. The donor body is separably contacted with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body by applying a thermal profile to the donor body. Implantation and exfoliation conditions may be adjusted in order to maximize the defect-free area of the lamina.

摘要翻译： 用于从施主实体产生层的方法包括：在植入期间，将施主体以离子剂量植入，并将施主体加热至植入温度。 施主体与供体体和基座组件直接接触的基座组件分离接触。 通过向施主体施加热分布，使薄片从供体体剥离。 可以调整植入和剥脱条件以最大化层的无缺陷区域。

公开(公告)号：US20120168091A1

公开(公告)日：2012-07-05

申请号：US13331915

申请日：2011-12-20

申请人： Adam Kell ,  Robert Clark-Phelps ,  Joseph D. Gillespie ,  Gopal Prabhu ,  Takao Sakase ,  Theodore H. Smick ,  Steve Zuniga ,  Steve Bababyan

发明人： Adam Kell ,  Robert Clark-Phelps ,  Joseph D. Gillespie ,  Gopal Prabhu ,  Takao Sakase ,  Theodore H. Smick ,  Steve Zuniga ,  Steve Bababyan

IPC分类号： B32B38/10

CPC分类号： H01L31/0288 ,  H01L21/67092 ,  H01L21/67132 ,  H01L21/6838 ,  H01L31/0747 ,  H01L31/1892 ,  Y02E10/50 ,  Y10T156/11 ,  Y10T156/1132

摘要： A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and separably contacting the donor body with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body, and a deforming force is applied to the lamina or to the donor body to separate the lamina from the donor body.

摘要翻译： 用于从施主体产生层的方法包括用离子剂量植入施主体，并将施主体与供体体和基座组件直接接触的基座组件分离接触。 薄片从供体体剥离，并且将变形力施加到椎板或施主体以将椎板与供体体分开。