SPECTRAL INTERFEROMETRY METHOD AND APPARATUS
    1.
    发明申请
    SPECTRAL INTERFEROMETRY METHOD AND APPARATUS 失效
    光谱干涉法和装置

    公开(公告)号:US20120062898A1

    公开(公告)日:2012-03-15

    申请号:US13178695

    申请日:2011-07-08

    Inventor: Adrian PODOLEANU

    Abstract: A spectral interferometry apparatus and method is provided to supply unambiguous profiles (A-scans free of mirror terms) of the reflectivity versus optical path difference and make difference between the positive and negative optical path difference or provide output in a selected interval of optical path differences. The apparatus comprises object optics that transfer a beam from an optical source to a target object (55) to produce an object beam and reference optics that produce a reference beam. Displacing means (57) are provided to produce a gap (g) between the object beam (41′) and the reference beam (42′). Optical spectrum dispersing means (7) such as a grating or a prism receive the two relatively displaced beams, and disperse their spectral content onto a reading element such as a CCD. The combination of the displacing means and the optical spectrum dispersing means creates an intrinsic optical delay between the wavetrains of the object beam and the reference beam which can be used with the optical path difference in the interferometer to generate a channelled spectrum for the optical path difference in the interferometer on the reading element.

    Abstract translation: 提供了一种光谱干涉测量装置和方法来提供反射率相对于光程差的明确分布(无镜像的A扫描),并使得在正和负光程差之间产生差异,或者在所选择的光程差间隔中提供输出 。 该装置包括将光束从光源传输到目标物体(55)以产生物体光束和产生参考光束的参考光学器件的物体光学器件。 设置位移装置(57)以在物体光束(41')和参考光束(42')之间产生间隙(g)。 诸如光栅或棱镜的光谱分散装置(7)接收两个相对移动的光束,并将其光谱含量分散到诸如CCD的读取元件上。 位移装置和光谱分散装置的组合在物体光束的波长与参考光束之间产生固有的光学延迟,该参考光束可与干涉仪中的光程差用于产生用于光程差的通道光谱 在干涉仪上读取元件。

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