-
1.
公开(公告)号:US20210249371A1
公开(公告)日:2021-08-12
申请号:US16786590
申请日:2020-02-10
Applicant: Advanced Semiconductor Engineering, Inc.
Inventor: Jia-Zhe LEE , Tai-Hung KUO
IPC: H01L23/00 , B81C1/00 , B81B7/02 , C09J183/04 , C09J127/22
Abstract: A semiconductor device package includes a substrate, a lid, a MEMS device and a gel. The lid is disposed on the substrate and defines a cavity together with the substrate. The MEMS device is disposed in the cavity. The gel covers the MEMS component. The lid is attached to the substrate through a silicone-based adhesive.