公开(公告)号：US10429634B2

公开(公告)日：2019-10-01

申请号：US15830834

申请日：2017-12-04

Applicant: Agiltron, Inc.

Inventor： Guanghai Jin ,  Congshun Wang ,  Jing Zhao

IPC: G02B26/00 ,  G01J3/26 ,  G02B6/293

Abstract: A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel.

公开(公告)号：US20190171001A1

公开(公告)日：2019-06-06

申请号：US15830834

申请日：2017-12-04

Applicant: Agiltron, Inc.

Inventor： Guanghai Jin ,  Congshun Wang ,  Luzhong Yin ,  Jing Zhao

IPC: G02B26/00 ,  G02B6/293 ,  G01J3/26

CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B6/29361 ,  G02B6/2938

Abstract: A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel.