THERMAL DRIVEN MEMS TUNABLE FILTER
    2.
    发明申请

    公开(公告)号:US20190171001A1

    公开(公告)日:2019-06-06

    申请号:US15830834

    申请日:2017-12-04

    申请人: Agiltron, Inc.

    IPC分类号: G02B26/00 G02B6/293 G01J3/26

    摘要: A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel.

    Microelectromechanical displacement structure and method for controlling displacement

    公开(公告)号:US10752492B2

    公开(公告)日:2020-08-25

    申请号:US15300212

    申请日:2015-03-24

    申请人: Agiltron, Inc.

    摘要: The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, and an end of the second beam coupled to a motion actuator; and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.

    Microelectromechanical displacement structure and method for controlling displacement

    公开(公告)号:US10730740B2

    公开(公告)日:2020-08-04

    申请号:US15282870

    申请日:2016-09-30

    申请人: Agiltron, Inc.

    发明人: Luzhong Yin Jing Zhao

    摘要: The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, an end of the second beam coupled to a motion actuator, and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.