公开(公告)号：US07770232B2

公开(公告)日：2010-08-03

申请号：US11887276

申请日：2006-03-16

申请人： Akira Saito ,  Masakazu Aono ,  Yuji Kuwahara ,  Jyunpei Maruyama ,  Ken Manabe

发明人： Akira Saito ,  Masakazu Aono ,  Yuji Kuwahara ,  Jyunpei Maruyama ,  Ken Manabe

IPC分类号： G01Q30/02

CPC分类号： G01N23/225 ,  G01Q30/02 ,  G01Q60/12

摘要： A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with high-brilliance monochromatic X-rays having a beam diameter smaller than 1 mm; a probe arranged to oppose to the measurement object; a processing means for detecting and processing a tunneling current through the probe; and a scanning probe microscope having an alignment means for relatively moving the measurement object, the probe, and the incident position of the high-brilliance monochromatic X-rays to the measurement object.

摘要翻译： 能够识别具有原子尺度空间分辨率的元件的扫描探针显微镜系统包括：X射线照射装置，用于用光束直径小于1mm的高亮度单色X射线照射测量对象; 设置成与测量对象相对的探针; 用于检测和处理穿过探针的隧穿电流的处理装置; 以及扫描探针显微镜，具有用于将测量对象，探针和高亮度单色X射线的入射位置相对移动到测量对象的对准装置。

公开(公告)号：US20080258059A1

公开(公告)日：2008-10-23

申请号：US11887276

申请日：2006-03-16

申请人： Akira Saito ,  Masakazu Aono ,  Yuji Kuwahara ,  Jyunpei Maruyama ,  Ken Manabe

发明人： Akira Saito ,  Masakazu Aono ,  Yuji Kuwahara ,  Jyunpei Maruyama ,  Ken Manabe

IPC分类号： G21K7/00

CPC分类号： G01N23/225 ,  G01Q30/02 ,  G01Q60/12

摘要： A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with high-brilliance monochromatic X-rays having a beam diameter smaller than 1 mm; a probe arranged to oppose to the measurement object; a processing means for detecting and processing a tunneling current through the probe; and a scanning probe microscope having an alignment means for relatively moving the measurement object, the probe, and the incident position of the high-brilliance monochromatic X-rays to the measurement object.

摘要翻译： 能够识别具有原子尺度空间分辨率的元件的扫描探针显微镜系统包括：X射线照射装置，用于用光束直径小于1mm的高亮度单色X射线照射测量对象; 设置成与测量对象相对的探针; 用于检测和处理穿过探针的隧穿电流的处理装置; 以及扫描探针显微镜，具有用于将测量对象，探针和高亮度单色X射线的入射位置相对移动到测量对象的对准装置。