公开(公告)号：US20070229809A1

公开(公告)日：2007-10-04

申请号：US11278624

申请日：2006-04-04

申请人： Alexander Belyaev ,  Daniel Kavaldjiev ,  Amith Murali ,  Aleksey Petrenko ,  Mike Kirk ,  David Shortt ,  Brian Haas ,  Kurt Haller

发明人： Alexander Belyaev ,  Daniel Kavaldjiev ,  Amith Murali ,  Aleksey Petrenko ,  Mike Kirk ,  David Shortt ,  Brian Haas ,  Kurt Haller

IPC分类号： G01N21/88

CPC分类号： G01N21/9501

摘要： Computer-implemented methods and systems for determining a configuration for a light scattering inspection system are provided. One computer-implemented method includes determining a three-dimensional map of signal-to-noise ratio values for data that would be acquired for a specimen and a potential defect on the specimen by the light scattering inspection system across a scattering hemisphere of the inspection system. The method also includes determining one or more portions of the scattering hemisphere in which the signal-to-noise ratio values are higher than in other portions of the scattering hemisphere based on the three-dimensional map. In addition, the method includes determining a configuration for a detection subsystem of the inspection system based on the one or more portions of the scattering hemisphere.

摘要翻译： 提供了用于确定光散射检查系统的配置的计算机实现的方法和系统。 一种计算机实现的方法包括：通过在检查系统的散射半球上的光散射检查系统来确定用于样本获取的数据和样本上的潜在缺陷的信噪比值的三维图 。 该方法还包括基于三维图确定散射半球的一个或多个部分，其中信噪比值高于散射半球的其它部分。 此外，该方法包括基于散射半球的一个或多个部分来确定检查系统的检测子系统的配置。

公开(公告)号：US07068363B2

公开(公告)日：2006-06-27

申请号：US10456203

申请日：2003-06-06

申请人： Christopher F. Bevis ,  Mike Kirk ,  Mehdi Vaez-Iravani

发明人： Christopher F. Bevis ,  Mike Kirk ,  Mehdi Vaez-Iravani

IPC分类号： G01N21/88

CPC分类号： G01N21/956 ,  G01N21/474 ,  G01N21/94 ,  G01N21/9501

摘要： Systems for inspection of patterned and unpatterned wafers are provided. One system includes an illumination system configured to illuminate the specimen. The system also includes a collector configured to collect light scattered from the specimen. In addition, the system includes a segmented detector configured to separately detect different portions of the light such that azimuthal and polar angular information about the different portions of light is preserved. The detector may also be configured to produce signals representative of the different portions of the light. The system may also include a processor configured to detect defects on the specimen from the signals. In another embodiment, the system may include a stage that is configured to rotate and translate the specimen. In one such embodiment, the system may also include an illumination system configured to scan the specimen in a wide scan path during rotation and translation of the specimen.

摘要翻译： 提供了用于图案化和未图案化晶片检查的系统。 一个系统包括被配置为照亮样本的照明系统。 该系统还包括收集器，用于收集从样品散射的光。 此外，该系统包括分段检测器，其被配置为分别检测光的不同部分，使得保持关于光的不同部分的方位角和极坐标信息。 检测器还可以被配置为产生表示光的不同部分的信号。 该系统还可以包括处理器，其配置成从信号中检测样本上的缺陷。 在另一个实施例中，系统可以包括被配置为旋转和平移样本的台。 在一个这样的实施例中，系统还可以包括被配置为在样本的旋转和平移期间以宽扫描路径扫描样本的照明系统。