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公开(公告)号：US20110069306A1
公开(公告)日：2011-03-24
申请号：US12994793
申请日：2009-05-29
申请人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , J. Rex Runyon
发明人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , J. Rex Runyon
CPC分类号： H01L21/6838
摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.
摘要翻译： 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。
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公开(公告)号：US07554656B2
公开(公告)日：2009-06-30
申请号：US11244451
申请日：2005-10-06
申请人： David Shortt , Stephen Biellak , Alexander Belyaev
发明人： David Shortt , Stephen Biellak , Alexander Belyaev
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/47 , G01N2021/4711 , G01N2021/8854
摘要： Methods and systems for inspection of a wafer are provided. One method includes illuminating the wafer with light at a first wavelength that penetrates into the wafer and light at a second wafer that does not substantially penetrate into the wafer. The method also includes generating output signals responsive to light from the wafer resulting from the illuminating step. In addition, the method includes detecting defects on the wafer using the output signals. The method further includes determining if the defects are subsurface defects or surface defects using the output signals.
摘要翻译： 提供了用于检查晶片的方法和系统。 一种方法包括用穿透晶片的第一波长的光照射晶片，并且在基本上不渗入晶片的第二晶片处照射晶片。 该方法还包括产生响应于来自晶片的光的输出信号，其由照明步骤产生。 此外，该方法包括使用输出信号检测晶片上的缺陷。 该方法还包括使用输出信号确定缺陷是否是地下缺陷或表面缺陷。
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公开(公告)号：US20090061426A1
公开(公告)日：2009-03-05
申请号：US11897892
申请日：2007-08-31
IPC分类号： C12Q1/68
CPC分类号： C12N15/62 , C07K2319/30 , C12N9/1252 , C12Q1/686 , G01N33/542 , G01N33/58 , G01N2458/10 , C12Q2521/101
摘要： The present invention provides methods, kits and compositions for the detection of an analyte. In the methods of the invention, a complex is formed between two or more analyte specific probes (ASP) and an analyte. The analyte specific probes each have a portion of a polymerase which interact to form a functional polymerase complex upon binding of the ASP to the analyte. The functional polymerase complex then generates a detectable signal which is indicative of the presence and/or amount of the analyte in the sample.
摘要翻译： 本发明提供了用于检测分析物的方法，试剂盒和组合物。 在本发明的方法中，在两种或更多种分析物特异性探针（ASP）和分析物之间形成复合物。 分析物特异性探针各自具有聚合酶的一部分，其在ASP与分析物结合时相互作用以形成功能性聚合酶复合物。 然后，功能性聚合酶复合物产生可检测的信号，其指示样品中分析物的存在和/或量。
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公开(公告)号：US20080050743A1
公开(公告)日：2008-02-28
申请号：US11821286
申请日：2007-06-22
IPC分类号： C12Q1/68
CPC分类号： C12Q1/6816 , C12Q2565/201 , C12Q2521/301 , C12Q2521/337
摘要： The present invention provides methods, kits and compositions for the detection of an analyte. The invention is particularly suited for the detection and quantification of analytes in solution. In the methods of the invention a complex is formed between two or more analyte specific probes (ASP) and an analyte. The reactive moieties of the probes interact upon the binding of the analyte specific probes to the analyte. The reactive moieties generate a nucleic acid cleavage product which is detected and indicative of the presence of the analyte.
摘要翻译： 本发明提供了用于检测分析物的方法，试剂盒和组合物。 本发明特别适用于溶液中分析物的检测和定量。 在本发明的方法中，在两种或多种分析物特异性探针（ASP）和分析物之间形成复合物。 探针的反应性部分在分析物特异性探针与分析物结合时相互作用。 反应性部分产生核酸切割产物，其被检测并指示分析物的存在。
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公开(公告)号：US20070081151A1
公开(公告)日：2007-04-12
申请号：US11244451
申请日：2005-10-06
申请人： David Shortt , Stephen Biellak , Alexander Belyaev
发明人： David Shortt , Stephen Biellak , Alexander Belyaev
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/47 , G01N2021/4711 , G01N2021/8854
摘要： Methods and systems for inspection of a wafer are provided. One method includes illuminating the wafer with light at a first wavelength that penetrates into the wafer and light at a second wafer that does not substantially penetrate into the wafer. The method also includes generating output signals responsive to light from the wafer resulting from the illuminating step. In addition, the method includes detecting defects on the wafer using the output signals. The method further includes determining if the defects are subsurface defects or surface defects using the output signals.
摘要翻译： 提供了用于检查晶片的方法和系统。 一种方法包括用穿透晶片的第一波长的光照射晶片，并且在基本上不渗入晶片的第二晶片处照射晶片。 该方法还包括产生响应于来自晶片的光的输出信号，其由照明步骤产生。 此外，该方法包括使用输出信号检测晶片上的缺陷。 该方法还包括使用输出信号确定缺陷是否是地下缺陷或表面缺陷。
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6.发明申请Protein kinase and phosphatase substrates and multiplex assays for identifying their activities 审中-公开蛋白激酶和磷酸酶底物以及用于鉴定其活性的多重测定公开(公告)号：US20060046277A1
公开(公告)日：2006-03-02
申请号：US10931251
申请日：2004-09-01
摘要： The present invention provides protein kinase and protein phosphatase substrates, methods of detecting protein kinases and protein phosphatases, and kits for detection of protein kinases and protein phosphatases. The substrates, methods, and kits use multiple substrates that can easily be differentiated from all other substrates, thus enabling rapid and easy detection of protein kinase or protein phosphatase activities. The invention also provides methods of directionally cloning nucleic acids.
摘要翻译： 本发明提供蛋白激酶和蛋白磷酸酶底物，检测蛋白激酶和蛋白磷酸酶的方法，以及用于检测蛋白激酶和蛋白磷酸酶的试剂盒。 底物，方法和试剂盒使用可以容易地从所有其他底物分化的多种底物，因此能够快速和容易地检测蛋白激酶或蛋白磷酸酶活性。 本发明还提供了定向克隆核酸的方法。
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公开(公告)号：US08817250B2
公开(公告)日：2014-08-26
申请号：US13226032
申请日：2011-09-06
申请人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , Christian H. Wolters , Howard W. Dando , Mehdi Vaez-Iravani , Carmela C. Moreno
发明人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , J. Rex Runyon , Christian H. Wolters , Howard W. Dando , Mehdi Vaez-Iravani
IPC分类号： G01N21/00
CPC分类号： H01L21/6838
摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.
摘要翻译： 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。
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公开(公告)号：US20120062877A1
公开(公告)日：2012-03-15
申请号：US13226032
申请日：2011-09-06
申请人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , J. Rex Runyon , Christian H. Wolters , Howard W. Dando , Mehdi Vaez-Iravani
发明人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , J. Rex Runyon , Christian H. Wolters , Howard W. Dando , Mehdi Vaez-Iravani
CPC分类号： H01L21/6838
摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.
摘要翻译： 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。
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公开(公告)号：US08042254B1
公开(公告)日：2011-10-25
申请号：US11963271
申请日：2007-12-21
CPC分类号： H01L21/68785 , Y10T29/49998 , Y10T279/18
摘要： An edge-handling chuck, a system for holding and rotating a test substrate at a high speed and a method for chucking a rotating substrate are disclosed. The Chuck includes a plate having a central axis, a fluid opening and a top surface with a varied topography characterized by symmetry about the central axis. The topography is such that a volume flow rate of fluid between the fluid opening and a periphery of the top surface sufficient to counteract substrate sagging is significantly less than a volume flow rate needed for a similar but flat-surfaced chuck to similarly counteract such sagging. The system may further include a spindle motor and a gas system that supplies gas through the fluid opening to a gap between the top surface and a back surface of the substrate. A radial velocity of the fluid through the gap is approximately constant.
摘要翻译： 公开了一种边缘处理卡盘，用于高速保持和旋转测试基板的系统以及用于夹持旋转基板的方法。 卡盘包括具有中心轴线的板，流体开口和具有以围绕中心轴线对称为特征的不同形貌的顶部表面。 这种形状使得流体开口和足以抵消底物下垂的顶表面周边之间的流体的体积流速显着小于类似但平坦表面的卡盘相似地抵消这种下垂所需的体积流量。 该系统还可以包括主轴电动机和气体系统，其将气体通过流体开口提供到衬底的顶表面和后表面之间的间隙。 通过间隙的流体的径向速度近似恒定。
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公开(公告)号：US07659069B2
公开(公告)日：2010-02-09
申请号：US11897892
申请日：2007-08-31
IPC分类号： C12Q1/68
CPC分类号： C12N15/62 , C07K2319/30 , C12N9/1252 , C12Q1/686 , G01N33/542 , G01N33/58 , G01N2458/10 , C12Q2521/101
摘要： The present invention provides methods, kits and compositions for the detection of an analyte. In the methods of the invention, a complex is formed between two or more analyte specific probes (ASP) and an analyte. The analyte specific probes each have a portion of a polymerase which interact to form a functional polymerase complex upon binding of the ASP to the analyte. The functional polymerase complex then generates a detectable signal which is indicative of the presence and/or amount of the analyte in the sample.
摘要翻译： 本发明提供了用于检测分析物的方法，试剂盒和组合物。 在本发明的方法中，在两种或更多种分析物特异性探针（ASP）和分析物之间形成复合物。 分析物特异性探针各自具有聚合酶的一部分，其在ASP与分析物结合时相互作用以形成功能性聚合酶复合物。 然后，功能性聚合酶复合物产生可检测的信号，其指示样品中分析物的存在和/或量。
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