公开(公告)号：US20230332890A1

公开(公告)日：2023-10-19

申请号：US18135098

申请日：2023-04-14

Applicant: Analog Devices, Inc.

Inventor： Arthur Y. Savchenko ,  Igor P. Prikhodko ,  Tyler Adam Dunn

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: Microelectromechanical systems (MEMS) yaw gyroscopes having out-of-plane quadrature trim electrodes are described. The gyroscope includes a proof mass configured to be driven in-plane. The proof mass includes an opening, or a plurality of openings. The out-of-plane quadrature trim electrodes are positioned to laterally overlap edges of the opening in a projection plane. The out-of-plane quadrature trim electrodes trim in-plane motion of the proof mass in one or two directions to limit quadrature motion. The out-of-plane quadrature trim electrodes may be arranged in a symmetric pattern to enable mode switching.