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公开(公告)号:US20230332890A1
公开(公告)日:2023-10-19
申请号:US18135098
申请日:2023-04-14
Applicant: Analog Devices, Inc.
Inventor: Arthur Y. Savchenko , Igor P. Prikhodko , Tyler Adam Dunn
IPC: G01C19/5712
CPC classification number: G01C19/5712
Abstract: Microelectromechanical systems (MEMS) yaw gyroscopes having out-of-plane quadrature trim electrodes are described. The gyroscope includes a proof mass configured to be driven in-plane. The proof mass includes an opening, or a plurality of openings. The out-of-plane quadrature trim electrodes are positioned to laterally overlap edges of the opening in a projection plane. The out-of-plane quadrature trim electrodes trim in-plane motion of the proof mass in one or two directions to limit quadrature motion. The out-of-plane quadrature trim electrodes may be arranged in a symmetric pattern to enable mode switching.
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公开(公告)号:US10120261B2
公开(公告)日:2018-11-06
申请号:US15479999
申请日:2017-04-05
Applicant: Analog Devices, Inc.
Inventor: Michael Ziemkiewicz , Scott Robert Davis , Michael Howard Anderson , Tyler Adam Dunn
Abstract: The present subject matter includes apparatus and techniques that can be used to reduce losses in systems that perform steering of a light beam. Such steering can be performed in a non-mechanical manner, such as using an electrically-controlled optical structure (e.g., an electro-optical structure). For example, a waveguide can be used to adjust an angle of a light beam (e.g., steer the light beam). The waveguide can include a core, a cladding including an electro-optic material, and electrodes defining an arrangement that, when selectively energized, adjusts an index of refraction of the electro-optic material. In particular, electrode arrangements as described herein can be used to reduce losses, such as losses that would occur due to diffraction.
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公开(公告)号:US20220057210A1
公开(公告)日:2022-02-24
申请号:US17515271
申请日:2021-10-29
Applicant: Analog Devices, Inc.
Inventor: Jeffrey A. Gregory , Charles Blackmer , Tyler Adam Dunn , Eugene Oh Hwang , Jinbo Kuang , Kemiao Jia , Laura Cornelia Popa , Igor P. Prikhodko , Erdinc Tatar
IPC: G01C19/5747 , G01C19/5712 , G01C19/5719 , G01C19/574
Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.
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公开(公告)号:US11193771B1
公开(公告)日:2021-12-07
申请号:US16894717
申请日:2020-06-05
Applicant: Analog Devices, Inc.
Inventor: Jeffrey A. Gregory , Charles Blackmer , Tyler Adam Dunn , Eugene Oh Hwang , Jinbo Kuang , Kemiao Jia , Laura Cornelia Popa , Igor P. Prikhodko , Erdinc Tatar
IPC: G01C19/5747 , G01C19/5712 , G01C19/5719 , G01C19/574
Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.
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公开(公告)号:US10684531B1
公开(公告)日:2020-06-16
申请号:US16283229
申请日:2019-02-22
Applicant: Analog Devices, Inc.
Inventor: Michael Ziemkiewicz , Tyler Adam Dunn , Michael Howard Anderson , Scott Robert Davis
Abstract: A light beam can be steered using a non-mechanical beam steerer structure. For example, a combination of sub-aperture and full-aperture beam steering structures can be used (e.g., corresponding to regions of controlled variation in an index of refraction). The sub-aperture elements can include tapered structures defining a saw-tooth or triangular footprint in the plane in which the in-plane steering is performed. Respective rows of sub-aperture tapered structures can be configured to controllably steer the light beam in the first in-plane direction, wherein at least one row of sub-aperture tapered structures defines a first base region edge that is tipped at a first specified in-plane angle relative to a second base region edge defined by another row. Use of the tipped configuration can simplify a configuration of the beam steerer structure, such as allowing a configuration lacking a compensation plate at the input.
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公开(公告)号:US20190383943A1
公开(公告)日:2019-12-19
申请号:US16365266
申请日:2019-03-26
Applicant: Analog Devices, Inc.
Inventor: Tyler Adam Dunn , Andrew William Sparks
Abstract: A lidar system and method includes a photodiode array, a wafer, and a plurality of structures integrated on the wafer to form a metasurface lens. The metasurface lens is configured to focus the light pulses to the photodiode array and each of the plurality of structures includes at least one dimension that is less than a wavelength of the light pulses.
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公开(公告)号:US20180292727A1
公开(公告)日:2018-10-11
申请号:US15479999
申请日:2017-04-05
Applicant: Analog Devices, Inc.
Inventor: Michael Ziemkiewicz , Scott R. Davis , Michael H. Anderson , Tyler Adam Dunn
IPC: G02F1/295
CPC classification number: G02F1/295 , G02F2201/06 , G02F2201/16 , G02F2203/24
Abstract: The present subject matter includes apparatus and techniques that can be used to reduce losses in systems that perform steering of a light beam. Such steering can be performed in a non-mechanical manner, such as using an electrically-controlled optical structure (e.g., an electro-optical structure). For example, a waveguide can be used to adjust an angle of a light beam (e.g., steer the light beam). The waveguide can include a core, a cladding including an electro-optic material, and electrodes defining an arrangement that, when selectively energized, adjusts an index of refraction of the electro-optic material. In particular, electrode arrangements as described herein can be used to reduce losses, such as losses that would occur due to diffraction.
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公开(公告)号:US12158523B2
公开(公告)日:2024-12-03
申请号:US16442051
申请日:2019-06-14
Applicant: Analog Devices, Inc.
Inventor: Tyler Adam Dunn , Andrew William Sparks
Abstract: A detector for use in detecting reflected or scattered light pulses for a lidar system includes a primary lens, a secondary lens, and a photodiode array. The primary lens is configured to collect and focus the light pulses, the secondary lens is configured to receive and further focus the light pulses from the primary lens, and the photodiode array is configured to receive and sense the light pulses from the secondary lens. At least one of the primary lens or the secondary lens are configured using liquid crystal polymer (LCP).
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公开(公告)号:US11971485B2
公开(公告)日:2024-04-30
申请号:US16365266
申请日:2019-03-26
Applicant: Analog Devices, Inc.
Inventor: Tyler Adam Dunn , Andrew William Sparks
IPC: G01S7/486 , G01S7/481 , G01S7/4863 , G01S17/10 , G01S17/87 , G01S17/88 , G02B1/00 , G02B3/00 , G02B3/12
CPC classification number: G01S17/88 , G01S7/4811 , G01S7/4816 , G01S7/4863 , G01S17/10 , G01S17/87 , G02B1/002 , G02B3/0037 , G02B3/12
Abstract: A lidar system and method includes a photodiode array, a wafer, and a plurality of structures integrated on the wafer to form a metasurface lens. The metasurface lens is configured to focus the light pulses to the photodiode array and each of the plurality of structures includes at least one dimension that is less than a wavelength of the light pulses.
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公开(公告)号:US11169426B2
公开(公告)日:2021-11-09
申请号:US16358529
申请日:2019-03-19
Applicant: Analog Devices, Inc.
Inventor: Michael Ziemkiewicz , Michael Howard Anderson , Tyler Adam Dunn , David Edward Fish , Scott Dennis Rommel , Andrew William Sparks , Scott Robert Davis
IPC: G02F1/295
Abstract: A Liquid Crystal Waveguide (LCW) system can provide sub-aperture incoupling or outcoupling of light having an input wavelength and input beamsize defining an aperture characteristic of the system. A Liquid Crystal Waveguide (LCW) can include a generally planar LCW core to receive light via a light input zone for communication toward a light output zone. Sub-aperture interfacial light couplers can be planarly arranged in or parallel to the planar LCW core in the light input zone or the light output zone. Sub-aperture interfacial light couplers can include teeth, prisms, or facets, a photonic crystal metasurface, or a geometric-phased holograph (GPH)). Overall LCW thickness can be reduced, which can be helpful in space-limited applications or for reducing material costs.
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