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公开(公告)号：US10855073B2
公开(公告)日：2020-12-01
申请号：US16035538
申请日：2018-07-13
摘要： A method of and apparatus for protecting a MEMS switch is provided. The method and apparatus improve the integrity of MEMS switches by reducing their vulnerability to current flow through them during switching of the MEMS switch between on and off or vice versa. The protection circuit provides for a parallel path, known as a shunt, around the MEMS component. However, components within the shunt circuit can themselves be removed from the shunt when they are not required. This improves the electrical performance of the shunt when the switch is supposed to be in an off state.
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公开(公告)号：US20190013668A1
公开(公告)日：2019-01-10
申请号：US16035538
申请日：2018-07-13
摘要： A method of and apparatus for protecting a MEMS switch is provided. The method and apparatus improve the integrity of MEMS switches by reducing their vulnerability to current flow through them during switching of the MEMS switch between on and off or vice versa. The protection circuit provides for a parallel path, known as a shunt, around the MEMS component. However, components within the shunt circuit can themselves be removed from the shunt when they are not required. This improves the electrical performance of the shunt when the switch is supposed to be in an off state.
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公开(公告)号：US11228310B2
公开(公告)日：2022-01-18
申请号：US17080785
申请日：2020-10-26
发明人： Ying Zhao , Alan O'Donnell , Michael James Twohig , Olly J. Kierse , James Thomas Sheeran , Michael C. W. Coln , Paul W. Stevens , Bruce A. Hecht , Padraig Fitzgerald , Mark Schirmer
摘要： Optically isolated micromachined (MEMS) switches and related methods are described. The optically isolated MEMS switches described herein may be used to provide isolation between electronic devices. For example, the optically isolated MEMS switches of the types described herein can enable the use of separate grounds between the receiving electronic device and the control circuitry. Isolation of high-voltage signals and high-voltage power supplies can be achieved by using an optical isolator and a MEMS switch, where the optical isolator controls the state of the MEMS switch. In some embodiments, utilizing optical isolators to provide high voltages, the need for electric high-voltage sources such as high-voltage power supplies and charge pumps may be removed, thus removing the cause of potential damage to the receiving electronic device. In one example, the optical isolator and the MEMS switch may be co-packaged on the same substrate.
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公开(公告)号：US20210067160A1
公开(公告)日：2021-03-04
申请号：US17080785
申请日：2020-10-26
发明人： Ying Zhao , Alan O'Donnell , Michael James Twohig , Olly J. Kierse , James Sheeran , Michael C.W. Coln , Paul W. Stevens , Bruce A. Hecht , Padraig Fitzgerald , Mark Schirmer
摘要： Optically isolated micromachined (MEMS) switches and related methods are described. The optically isolated MEMS switches described herein may be used to provide isolation between electronic devices. For example, the optically isolated MEMS switches of the types described herein can enable the use of separate grounds between the receiving electronic device and the control circuitry. Isolation of high-voltage signals and high-voltage power supplies can be achieved by using an optical isolator and a MEMS switch, where the optical isolator controls the state of the MEMS switch. In some embodiments, utilizing optical isolators to provide high voltages, the need for electric high-voltage sources such as high-voltage power supplies and charge pumps may be removed, thus removing the cause of potential damage to the receiving electronic device. In one example, the optical isolator and the MEMS switch may be co-packaged on the same substrate.
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