公开(公告)号：US20110095178A1

公开(公告)日：2011-04-28

申请号：US12909720

申请日：2010-10-21

申请人： Anastassios GIANNAKOPULOS ,  Alexander A. MAKAROV

发明人： Anastassios GIANNAKOPULOS ,  Alexander A. MAKAROV

IPC分类号： H01J49/00

CPC分类号： H01J37/244 ,  H01J49/025 ,  H01J2237/2444

摘要： Embodiments of the invention provide a detection apparatus for detecting charged particles having a charged particle detector for receiving and detecting either incoming charged particles or secondary charged particles generated from the incoming charged particles, a photon generator for generating photons in response to receiving at least some of the same incoming charged particles or secondary charged particles generated from the incoming charged particles as are received and detected by the charged particle detector, and a photon detector for detecting photons generated by the photon generator.

摘要翻译： 本发明的实施例提供了一种检测装置，用于检测具有带电粒子检测器的带电粒子的检测装置，用于接收和检测从进入的带电粒子产生的输入带电粒子或二次带电粒子;光子发生器，用于响应于接收至少一些 由带电粒子检测器接收和检测从进入的带电粒子产生的相同的进入带电粒子或二次带电粒子，以及用于检测由光子发生器产生的光子的光子检测器。

公开(公告)号：US20110095177A1

公开(公告)日：2011-04-28

申请号：US12909507

申请日：2010-10-21

申请人： Anastassios GIANNAKOPULOS ,  Alexander A. Makarov

发明人： Anastassios GIANNAKOPULOS ,  Alexander A. Makarov

IPC分类号： H01J49/00

CPC分类号： H01J49/025 ,  H01J49/40 ,  H01J2237/2444

摘要： Embodiments of the invention provide a detection apparatus for detecting charged particles having a secondary particle generator for generating secondary charged particles in response to receiving incoming charged particles, a charged particle detector for receiving and detecting secondary charged particles generated by the secondary particle generator, a photon generator for generating photons in response to receiving secondary charged particles generated by the secondary particle generator, and a photon detector for detecting the photons generated by the photon generator.

摘要翻译： 本发明的实施例提供了一种用于检测带有二次粒子发生器的带电粒子的检测装置，用于响应于接收进入的带电粒子而产生二次带电粒子，用于接收和检测由二次粒子发生器产生的二次带电粒子的带电粒子检测器， 用于响应于由二次粒子发生器产生的接收二次带电粒子而产生光子的发生器，以及用于检测由光子发生器产生的光子的光子检测器。