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    Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectrometer
    1.
    发明授权
    Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectrometer 有权
    用于检测带电粒子的检测装置，用于检测带电粒子的方法和质谱仪

    公开(公告)号：US08642973B2

    公开(公告)日：2014-02-04

    申请号：US12909720

    申请日：2010-10-21

    申请人： Anastassios Giannakopulos ,  Alexander A. Makarov

    发明人： Anastassios Giannakopulos ,  Alexander A. Makarov

    IPC分类号： H01J37/244 ,  H01J49/02

    CPC分类号： H01J37/244 ,  H01J49/025 ,  H01J2237/2444

    摘要： Embodiments of the invention provide a detection apparatus for detecting charged particles having a charged particle detector for receiving and detecting either incoming charged particles or secondary charged particles generated from the incoming charged particles, a photon generator for generating photons in response to receiving at least some of the same incoming charged particles or secondary charged particles generated from the incoming charged particles as are received and detected by the charged particle detector, and a photon detector for detecting photons generated by the photon generator.

    摘要翻译： 本发明的实施例提供了一种检测装置，用于检测具有带电粒子检测器的带电粒子的检测装置，用于接收和检测从进入的带电粒子产生的输入带电粒子或二次带电粒子;光子发生器，用于响应于接收至少一些 由带电粒子检测器接收和检测从进入的带电粒子产生的相同的进入带电粒子或二次带电粒子，以及用于检测由光子发生器产生的光子的光子检测器。

    Electron beam apparatus and electron beam inspection method
    2.
    发明授权
    Electron beam apparatus and electron beam inspection method 有权
    电子束装置和电子束检查方法

    公开(公告)号：US08431893B2

    公开(公告)日：2013-04-30

    申请号：US13530797

    申请日：2012-06-22

    申请人： Muneyuki Fukuda ,  Tomoyasu Shojo ,  Mitsugu Sato ,  Atsuko Fukada ,  Naomasa Suzuki ,  Ichiro Tachibana

    发明人： Muneyuki Fukuda ,  Tomoyasu Shojo ,  Mitsugu Sato ,  Atsuko Fukada ,  Naomasa Suzuki ,  Ichiro Tachibana

    IPC分类号： H01J37/28

    CPC分类号： H01J37/28 ,  H01J37/244 ,  H01J2237/221 ,  H01J2237/2444 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24495

    摘要： An electron beam apparatus which includes a sample stage on which a sample is placed, and an electron optical system. The electron optical system includes an electron gun that generates a primary electron beam, an immersion objective lens that converges the primary electron beam on the sample, an E×B deflector that separates a secondary particle, which is generated from irradiation of the primary beam to the sample, from an optical axis of the primary beam, a reflecting member to which the secondary particle collides, an assist electrode which is located under the reflecting member, a plurality of incidental particle detectors that selectively detect a velocity component and an azimuth component of a ternary particle which is generated by the secondary particle colliding to the reflecting member, and a center detector that is located above the reflecting member.

    摘要翻译： 一种电子束装置，包括放置样品的样品台和电子光学系统。 电子光学系统包括：电子枪，其产生一次电子束，将一次电子束收敛在样品上的浸没物镜;将主光束照射产生的二次粒子分离的E×B偏转器; 来自主光束的光轴的样品，二次粒子碰撞的反射部件，位于反射部件下方的辅助电极，多个附带的粒子检测器，其选择性地检测速度分量和方位分量 由二次粒子与反射部件碰撞产生的三元粒子，以及位于反射部件上方的中心检测器。

    Detection Apparatus for Detecting Charged Particles, Methods for Detecting Charged Particles and Mass Spectrometer
    4.
    发明申请
    Detection Apparatus for Detecting Charged Particles, Methods for Detecting Charged Particles and Mass Spectrometer 有权
    用于检测带电粒子的检测装置，检测带电粒子的方法和质谱仪

    公开(公告)号：US20110095177A1

    公开(公告)日：2011-04-28

    申请号：US12909507

    申请日：2010-10-21

    申请人： Anastassios GIANNAKOPULOS ,  Alexander A. Makarov

    发明人： Anastassios GIANNAKOPULOS ,  Alexander A. Makarov

    IPC分类号： H01J49/00

    CPC分类号： H01J49/025 ,  H01J49/40 ,  H01J2237/2444

    摘要： Embodiments of the invention provide a detection apparatus for detecting charged particles having a secondary particle generator for generating secondary charged particles in response to receiving incoming charged particles, a charged particle detector for receiving and detecting secondary charged particles generated by the secondary particle generator, a photon generator for generating photons in response to receiving secondary charged particles generated by the secondary particle generator, and a photon detector for detecting the photons generated by the photon generator.

    摘要翻译： 本发明的实施例提供了一种用于检测带有二次粒子发生器的带电粒子的检测装置，用于响应于接收进入的带电粒子而产生二次带电粒子，用于接收和检测由二次粒子发生器产生的二次带电粒子的带电粒子检测器， 用于响应于由二次粒子发生器产生的接收二次带电粒子而产生光子的发生器，以及用于检测由光子发生器产生的光子的光子检测器。

    DETECTOR FOR ELECTRON COLUMN AND METHOD FOR DETECTING ELECTRONS FOR ELECTRON COLUMN
    7.
    发明申请
    DETECTOR FOR ELECTRON COLUMN AND METHOD FOR DETECTING ELECTRONS FOR ELECTRON COLUMN 有权
    电子探针检测器及检测电子束电子的方法

    公开(公告)号：US20090014650A1

    公开(公告)日：2009-01-15

    申请号：US12064071

    申请日：2006-08-18

    申请人： Ho Seob Kim

    发明人： Ho Seob Kim

    IPC分类号： G01N23/00

    CPC分类号： H01J37/244 ,  H01J2237/2444

    摘要： In a conventional micro-channel plate (MCP), a secondary electron (SE) detector or a semi-conductor detector the number of the electrons is amplified through its own structure. For such amplification a small voltage difference is applied externally or generated due to its own structure and material. The electric current of electrons undergoing the above-described procedure is amplified by an external amplification circuit. In the present invention electrons—resulting from the collision of the electron beam generated by a microcolumn—are detected by surrounding conductive wiring. The detected electrons are amplified using an amplification circuit on the outside similar to a conventional detection method.

    摘要翻译： 在传统的微通道板（MCP），二次电子（SE）检测器或半导体检测器中，电子数通过其自身的结构被放大。 对于这种放大，由于其自​​身的结构和材料，外部施加小的电压差或产生。 经过上述步骤的电子的电流被外部放大电路放大。 在本发明中，由微柱产生的电子束的碰撞产生的电子通过周围的导电布线来检测。 使用外部的放大电路来检测检测到的电子，与常规的检测方法类似。

    Miniaturized secondary electron detector
    9.
    发明授权
    Miniaturized secondary electron detector 失效
    小型二次电子探测器

    公开(公告)号：US6130429A

    公开(公告)日：2000-10-10

    申请号：US198572

    申请日：1998-11-23

    申请人： Takayuki Ambe ,  Ichiro Honjo

    发明人： Takayuki Ambe ,  Ichiro Honjo

    IPC分类号： H01J37/244

    CPC分类号： H01J37/244 ,  H01J2237/2444 ,  H01J2237/2448

    摘要： To miniaturize a secondary-electron detector, a ring-shaped secondary-electron emissive material layer 44A is formed on a ring-shaped base 41 having a round hole 41a, via a ring-shaped insulating layer 42A and a ring-shaped high resistance layer 43A. Similarly, a ring-shaped secondary-electron emissive material layer 44B is formed on a ring-shaped base 33 having a round hole 33a, via a ring-shaped insulating layer 42B and a ring-shaped high resistance layer 43B. A arc-shaped multiplied-electron collecting electrode 461 is joined between the insulating layers 42A and 42B outside the secondary-electron emissive material layer 44B. A porous secondary-electron multiplication substance may be filled between opposed bases instead of the secondary-electron emissive material layers 44A and 44B, and an optical fiber coated with phosphor may be used instead of the electrode 461.

    摘要翻译： 为了使二次电子检测器小型化，环状二次电子发射材料层44A通过环形绝缘层42A和环形高电阻层形成在具有圆孔41a的环形基座41上 43A。 类似地，通过环形绝缘层42B和环形高电阻层43B，在具有圆孔33a的环形基座33上形成环形二次电子发射材料层44B。 在二次电子发射材料层44B外部的绝缘层42A和42B之间连接有弧形的倍增电子收集电极461。 多孔二次电子倍增物质可以填充在相对的基底之间而不是二次电子发射材料层44A和44B，并且可以使用涂覆有磷光体的光纤代替电极461。

    Inspection Device and Measurement Device
    10.
    发明申请
    Inspection Device and Measurement Device 有权
    检测装置和测量装置

    公开(公告)号：US20160322193A1

    公开(公告)日：2016-11-03

    申请号：US15109726

    申请日：2014-12-08

    申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

    发明人： Masami MAKUUCHI ,  Takahiro JINGU

    IPC分类号： H01J37/244 ,  H01J37/28 ,  G01N21/94 ,  G01N21/95

    CPC分类号： H01J37/244 ,  A61B5/0059 ,  A61B5/0075 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/956 ,  H01J37/28 ,  H01J49/00 ,  H01J2237/2443 ,  H01J2237/2444 ,  H01J2237/2445 ,  H01J2237/24495

    摘要： A detection circuit for accurately detecting a very small foreign material and an inspection/measurement device using the same are provided. The inspection/measurement device includes: an irradiation section that irradiates a laser beam to a surface of a specimen; and a detection section that detects scattered light from the surface of the specimen and generates a detection signal. The detection section includes: a photon counting sensor that outputs M output signals from photo-detecting elements of N pixels (N and N are natural numbers, and M

    摘要翻译： 提供了一种用于精确检测非常小的异物的检测电路和使用其的检查/测量装置。 检查/测量装置包括：照射部，其将激光束照射到试样的表面; 以及检测部，其检测来自所述检体的表面的散射光，并生成检测信号。 检测部分包括：光子计数传感器，其从N个像素的光检测元件输出M个输出信号（N和N是自然数，M